Cold starting temperature time-related compensation model of inertial sensors based on particle swarm optimization algorithm

J Wu, T Huang, Z Zhu, K Song - Review of Scientific Instruments, 2021 - pubs.aip.org
With the miniaturization of inertial instruments, sensors mounted inside are vulnerable to
interference. In a complex thermal transmission environment, temperature drift is the main …

Epitaxial Polysilicon MEMS Temperature Sensor With 0.043° C Resolution at 4-Hz Data Rate

P Frigerio, A Fagnani, V Zega, G Gattere… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
This work discloses a temperature sensor based on a polysilicon microelectromechanical
systems (MEMS) resonator. The system exploits the temperature drift of the resonance …

Evaluation of Accelerometer Dynamic Performance Based on Multiple Indices in the Time and Frequency Domain

W Yi, H Tiantian, Y Lingyun, Z Zhijuan… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
The problem of dynamic performance in accelerometer is a topic that has not reached a
consensus in terms of definition, standards, experiment, and evaluation. In view of the …

MEMS resonant temperature sensing with variable coupling stiffness and improved sensitivity

E Şımşek, K Azgin - 2020 Joint Conference of the IEEE …, 2020 - ieeexplore.ieee.org
This paper reports the sensitivity improvement of a double-ended tuning fork resonant
thermal strain sensor operating close to buckling limit with electrostatic softening and …