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Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization
The material removal rate (MRR) is an important variable but difficult to measure in the
chemical–mechanical planarization (CMP) process. Most data-based virtual metrology (VM) …
chemical–mechanical planarization (CMP) process. Most data-based virtual metrology (VM) …
Prediction of Material Removal Rate Using Phase Partition and Semi-supervised Regression
C Lv, J Huang, H Wang, T Zhang - 2022 China Automation …, 2022 - ieeexplore.ieee.org
In the Chemical Mechanical Planarization (CMP) process, the Material Removal Rate (MRR)
is an important indicator of polishing performance. However, MRR is difficult to be …
is an important indicator of polishing performance. However, MRR is difficult to be …