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Recent advances in focused ion beam nanofabrication for nanostructures and devices: Fundamentals and applications
The past few decades have witnessed growing research interest in develo** powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …
The 3D controllable fabrication of nanomaterials with FIB-SEM synchronization technology
Nanomaterials with unique structures and functions have been widely used in the fields of
microelectronics, biology, medicine, and aerospace, etc. With advantages of high resolution …
microelectronics, biology, medicine, and aerospace, etc. With advantages of high resolution …
[HTML][HTML] The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication
Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial
precision below 5 nm. Achieving such a high patterning precision over large areas and for …
precision below 5 nm. Achieving such a high patterning precision over large areas and for …
[HTML][HTML] Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path
Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing
transparent materials, has been studied to overcome difficulties in glass micromachining …
transparent materials, has been studied to overcome difficulties in glass micromachining …
Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation
Superconducting nanowire single-photon detectors (SNSPDs) are indispensable in fields
such as quantum science and technology, astronomy, and biomedical imaging, where high …
such as quantum science and technology, astronomy, and biomedical imaging, where high …
CAD/CAM for scalable nanomanufacturing: A network-based system for hybrid 3D printing
Micro-and nano-structuring have been highlighted over several decades in both science
and engineering fields. In addition to continuous efforts in fabrication techniques …
and engineering fields. In addition to continuous efforts in fabrication techniques …
[HTML][HTML] Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography
Metal oxide semiconductor (MOS) gas sensors are widely used for gas detection. Typically,
the hotplate element is the key component in MOS gas sensors which provide a proper and …
the hotplate element is the key component in MOS gas sensors which provide a proper and …
Effect of focused ion beam process parameter on Tin-Nickel-Copper micropillars microfabrication
In this work, the mechanism of focused ion beam (FIB) milling as an advanced
manufacturing technique is studied to pattern micropillars at different diameter sizes of 5, 10 …
manufacturing technique is studied to pattern micropillars at different diameter sizes of 5, 10 …
Focused ion beam micro-machining
Focused ion beam (FIB) micro-machining has become an invaluable tool for studying
quantum materials due to its capability to precisely define the shape and dimensions of …
quantum materials due to its capability to precisely define the shape and dimensions of …
Finish-pass strategy to improve sidewall angle and processing time in FIB milled structures
Abstract Focused Ion Beams (FIB) systems are employed for their ability to manipulate and
remove material on the nanoscale for creating complex structures. By splitting the milling job …
remove material on the nanoscale for creating complex structures. By splitting the milling job …