Recent advances in focused ion beam nanofabrication for nanostructures and devices: Fundamentals and applications

P Li, S Chen, H Dai, Z Yang, Z Chen, Y Wang, Y Chen… - Nanoscale, 2021‏ - pubs.rsc.org
The past few decades have witnessed growing research interest in develo** powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …

The 3D controllable fabrication of nanomaterials with FIB-SEM synchronization technology

L Zhao, Y Cui, J Li, Y **e, W Li, J Zhang - Nanomaterials, 2023‏ - mdpi.com
Nanomaterials with unique structures and functions have been widely used in the fields of
microelectronics, biology, medicine, and aerospace, etc. With advantages of high resolution …

[HTML][HTML] The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

V Deinhart, LM Kern, JN Kirchhof… - Beilstein journal of …, 2021‏ - beilstein-journals.org
Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial
precision below 5 nm. Achieving such a high patterning precision over large areas and for …

[HTML][HTML] Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path

KK Kwon, KY Song, JM Seo, CN Chu… - Journal of Materials …, 2021‏ - Elsevier
Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing
transparent materials, has been studied to overcome difficulties in glass micromachining …

Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation

S Strohauer, F Wietschorke, M Döblinger… - arxiv preprint arxiv …, 2025‏ - arxiv.org
Superconducting nanowire single-photon detectors (SNSPDs) are indispensable in fields
such as quantum science and technology, astronomy, and biomedical imaging, where high …

CAD/CAM for scalable nanomanufacturing: A network-based system for hybrid 3D printing

HS Yoon, HT Lee, KH Jang, CS Kim, H Park… - Microsystems & …, 2017‏ - nature.com
Micro-and nano-structuring have been highlighted over several decades in both science
and engineering fields. In addition to continuous efforts in fabrication techniques …

[HTML][HTML] Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography

Z Feng, D Giubertoni, A Cian, M Valt, M Barozzi… - Micromachines, 2023‏ - mdpi.com
Metal oxide semiconductor (MOS) gas sensors are widely used for gas detection. Typically,
the hotplate element is the key component in MOS gas sensors which provide a proper and …

Effect of focused ion beam process parameter on Tin-Nickel-Copper micropillars microfabrication

NS M. Annuar, R Mahmoodian… - Materials and …, 2020‏ - Taylor & Francis
In this work, the mechanism of focused ion beam (FIB) milling as an advanced
manufacturing technique is studied to pattern micropillars at different diameter sizes of 5, 10 …

Focused ion beam micro-machining

MD Bachmann, MD Bachmann - Manipulating Anisotropic Transport and …, 2020‏ - Springer
Focused ion beam (FIB) micro-machining has become an invaluable tool for studying
quantum materials due to its capability to precisely define the shape and dimensions of …

Finish-pass strategy to improve sidewall angle and processing time in FIB milled structures

MJ Lid, AB Afif, J Torgersen, FB Prinz - Procedia Structural Integrity, 2021‏ - Elsevier
Abstract Focused Ion Beams (FIB) systems are employed for their ability to manipulate and
remove material on the nanoscale for creating complex structures. By splitting the milling job …