Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

This paper introduces the first tunable ferroelectric capacitor (FeCAP)-based unreleased RF
MEMS resonator, integrated seamlessly in Texas Instruments' 130 nm Ferroelectric RAM …

In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …

This work proposes a novel electrostatic mechanically coupled narrowband filter based on
width extensional mode (WEM) resonators. Rectangle plate WEM resonators have the …

This work presents a novel radio frequency (RF) narrowband Si micro-electro-mechanical
systems (MEMS) filter based on capacitively transduced slotted width extensional mode …

This paper presents a micromechanical clamped–clamped beam (CC-beam) displacement
amplifier based on a CMOS-MEMS fabrication process platform. In particular, a 2.0 MHz …

Despite recent efforts toward true electromechanical resonator-based computing, achieving
complex logic functions through cascading micro resonators has been deterred by …

Resonant sensors are widely used, especially in microsystems, for their high sensitivity,
dynamic range, and resolution. In a typical resonant sensor, the measurand is converted to …