Si-based MEMS resonant sensor: A review from microfabrication perspective

G Verma, K Mondal, A Gupta - Microelectronics Journal, 2021 - Elsevier
With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

Dynamics of 2D material membranes

PG Steeneken, RJ Dolleman, D Davidovikj… - 2D …, 2021 - iopscience.iop.org
The dynamics of suspended two-dimensional (2D) materials has received increasing
attention during the last decade, yielding new techniques to study and interpret the physics …

A fast and sensitive room-temperature graphene nanomechanical bolometer

A Blaikie, D Miller, BJ Alemán - Nature communications, 2019 - nature.com
Bolometers are a powerful means of detecting light. Emerging applications demand that
bolometers work at room temperature, while maintaining high speed and sensitivity …

Resonant transducers consisting of graphene ribbons with attached proof masses for NEMS sensors

X Fan, D Moreno-Garcia, J Ding… - ACS Applied Nano …, 2023 - ACS Publications
The unique mechanical and electrical properties of graphene make it an exciting material for
nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate …

Room-temperature fiber tip nanoscale optomechanical bolometer

S Liu, Y Chen, H Lai, M Zou, H **ao, P Chen… - ACS …, 2022 - ACS Publications
Nanomechanical bolometers have proven to be well suited to the analysis of light. However,
conventional wafer-based devices have limited practical applications because they require …

Highly sensitive hydrogen sensor based on an optical driven nanofilm resonator

J Luo, S Liu, P Chen, Y Chen, J Zhong… - ACS Applied Materials …, 2022 - ACS Publications
Nanofilm resonators combine ultracompact and highly mechanically sensitive properties,
making them intriguing devices for sensing applications. For trace hydrogen detection, we …

Kirigami engineering of suspended graphene transducers

C Dai, Y Rho, K Pham, B McCormick… - Nano Letters, 2022 - ACS Publications
The low mass density and high mechanical strength of graphene make it an attractive
candidate for suspended-membrane energy transducers. Typically, the membrane size …

Recent advances in micro-and bio-electromechanical system architectures for energy efficient chemiresistors

B Sharma, M Kumar, A Sharma - Microelectronic Engineering, 2024 - Elsevier
The recent evolution of microelectromechanical systems (MEMSs) presents a more mature
technology that expands from pure research towards multidisciplinary …

Tailoring spin waves in 2D transition metal phosphorus trichalcogenides via atomic-layer substitution

AM Ruiz, DL Esteras, A Rybakov, JJ Baldoví - Dalton Transactions, 2022 - pubs.rsc.org
The family of two-dimensional (2D) van der Waals transition metal phosphorus
trichalcogenides has received renewed interest due to their intrinsic 2D antiferromagnetism …

Experimental mid-infrared absorption (84%) of single-layer graphene in a reflective asymmetric Fabry–Perot filter: Implications for photodetectors

A Nematpour, N Lisi, L Lancellotti… - ACS Applied Nano …, 2021 - ACS Publications
There is a growing interest toward graphene and 2D materials for their exceptional
geometrical, optical, and electronic features, which make them unique for photonic and …