CMUT enabled binary mixture gas sensing through time of flight measurement

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Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures‏

I Dufour, LI Hernandez, P Shanmugam… - … Joint Conference of …, 2020‏ - ieeexplore.ieee.org‏
Principles of gas detection using either resonant microcantilevers or CMUTs without
sensitive coating are presented. The different principles which have been tested for …‏
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