Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - Journal of Micromechanics …, 2021 - iopscience.iop.org
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Gallium nitride as an electromechanical material

M Rais-Zadeh, VJ Gokhale, A Ansari… - Journal of …, 2014 - ieeexplore.ieee.org
Gallium nitride (GaN) is a wide bandgap semiconductor material and is the most popular
material after silicon in the semiconductor industry. The prime movers behind this trend are …

[LIVRE][B] Infrared and terahertz detectors

A Rogalski - 2019 - books.google.com
This new edition of Infrared and Terahertz Detectors provides a comprehensive overview of
infrared and terahertz detector technology, from fundamental science to materials and …

Highly Sensitive Broadband Bolometric Photodetectors based on 2D PdSe2 Thin Film

R Zhang, Z Yang, L Liu, J Lin, S Wen… - Advanced Optical …, 2023 - Wiley Online Library
PdSe2, a semiconductor with a narrow band gap, shows tremendous promise for high‐
performance broadband photodetectors. In this study, highly sensitive, broadband, and …

[HTML][HTML] Tutorial: Piezoelectric and magnetoelectric N/MEMS—Materials, devices, and applications

AR Will-Cole, AE Hassanien, SD Calisgan… - Journal of Applied …, 2022 - pubs.aip.org
Nano-and micro-electromechanical systems (N/MEMSs) are traditionally based on
electrostatic or piezoelectric coupling, which couples electrical and mechanical energy …

Micromechanical bolometers for subterahertz detection at room temperature

L Vicarelli, A Tredicucci, A Pitanti - ACS photonics, 2022 - ACS Publications
Fast room-temperature imaging at terahertz (THz) and subterahertz (sub-THz) frequencies is
an interesting technique that could unleash the full potential of plenty of applications in …

Anchor loss in hemispherical shell resonators

A Darvishian, B Shiari, JY Cho… - Journal of …, 2017 - ieeexplore.ieee.org
Micromachined hemispherical shell resonators (HSRs) can be used in high accuracy
vibratory gyroscopes. These resonators need to have very low energy loss to achieve very …

Ultrathin 2 nm gold as impedance-matched absorber for infrared light

N Luhmann, D Høj, M Piller, H Kähler, MH Chien… - Nature …, 2020 - nature.com
Thermal detectors are a cornerstone of infrared and terahertz technology due to their broad
spectral range. These detectors call for efficient absorbers with a broad spectral response …

Terahertz detectors using microelectromechanical system resonators

C Li, Y Zhang, K Hirakawa - Sensors, 2023 - mdpi.com
The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit
extremely high sensitivity to tiny changes in the resonance frequency owing to their high …

Graphene–aluminum nitride NEMS resonant infrared detector

Z Qian, Y Hui, F Liu, S Kang, S Kar… - Microsystems & …, 2016 - nature.com
The use of micro-/nanoelectromechanical resonators for the room temperature detection of
electromagnetic radiation at infrared frequencies has recently been investigated, showing …