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Dawn of nitride ferroelectric semiconductors: from materials to devices
III-nitride semiconductors are promising optoelectronic and electronic materials and have
been extensively investigated in the past decades. New functionalities, such as …
been extensively investigated in the past decades. New functionalities, such as …
Strain sensing technology to enable next-generation industry and smart machines for the factories of the future: a review
Y Hamed, G O'Donnell, N Lishchenko… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
In the era of digitalization, there is a huge focus on capturing data from manufacturing
processes and systems. Since the promotion of Industry 4.0, the industrial marketplace has …
processes and systems. Since the promotion of Industry 4.0, the industrial marketplace has …
Scandium-doped aluminum nitride for acoustic wave resonators, filters, and ferroelectric memory applications
Scandium-doped aluminum nitride (AlScN) has generated great research interest owing to
its unique properties. The wurtzite-structure AlScN is compatible with the complementary …
its unique properties. The wurtzite-structure AlScN is compatible with the complementary …
Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes
Spurious modes (SMs) suppression and electromechanical coupling coefficient ()
improvement in Lamb wave resonators (LWRs) have always been the research hotspot. In …
improvement in Lamb wave resonators (LWRs) have always been the research hotspot. In …
Micro-force sensing techniques and traceable reference forces: A review
Y Yang, M Zhao, H Yinguo, H Zhang… - Measurement …, 2022 - iopscience.iop.org
Micro-force measurement with high resolution, accuracy, and reliability is of interest in a
broad range of applications including gravitational-wave detection, intelligent healthcare …
broad range of applications including gravitational-wave detection, intelligent healthcare …
Advancements in one-port surface acoustic wave (SAW) resonators for sensing applications: A review
CK Kent, N Ramakrishnan… - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
Surface acoustic wave (SAW) devices have long been recognized as proficient sensors,
capable of detecting an array of chemical and physical parameters. These range from the …
capable of detecting an array of chemical and physical parameters. These range from the …
AlN/Sapphire-based SAW resonators with Q over 10000 for temperature sensors
Y Ai, H Lv, Y Huang, J He, Y Wang, J Wu… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
A surface acoustic wave (SAW) resonator with quality factors () of 3526/10 205 at the
resonant/antiresonant frequencies () has been fabricated on thick metal-organic chemical …
resonant/antiresonant frequencies () has been fabricated on thick metal-organic chemical …
[HTML][HTML] Development of temperature sensor based on AlN/ScAlN SAW resonators
Temperature monitoring in extreme environments presents new challenges for MEMS
sensors. Since aluminum nitride (AlN)/scandium aluminum nitride (ScAlN)-based surface …
sensors. Since aluminum nitride (AlN)/scandium aluminum nitride (ScAlN)-based surface …
Experimental and theoretical studies of effective piezoelectric coefficients of 2-2 connectivity AlN/AlScN composite piezoelectric films
Abstract Aluminum nitride (AlN) and Sc-doped AlN have become the most popular
piezoelectric thin-film materials in the fields of RF and smart sensing. AlN/AlScN composite …
piezoelectric thin-film materials in the fields of RF and smart sensing. AlN/AlScN composite …
High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film
One approach to extend the acoustic applications of aluminum nitride (AlN) in the GHz
frequency range is to take advantage of the piezoelectric performance and high acoustic …
frequency range is to take advantage of the piezoelectric performance and high acoustic …