Dawn of nitride ferroelectric semiconductors: from materials to devices

P Wang, D Wang, S Mondal, M Hu… - Semiconductor Science …, 2023 - iopscience.iop.org
III-nitride semiconductors are promising optoelectronic and electronic materials and have
been extensively investigated in the past decades. New functionalities, such as …

Strain sensing technology to enable next-generation industry and smart machines for the factories of the future: a review

Y Hamed, G O'Donnell, N Lishchenko… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
In the era of digitalization, there is a huge focus on capturing data from manufacturing
processes and systems. Since the promotion of Industry 4.0, the industrial marketplace has …

Scandium-doped aluminum nitride for acoustic wave resonators, filters, and ferroelectric memory applications

L Chen, C Liu, M Li, W Song, W Wang… - ACS Applied …, 2022 - ACS Publications
Scandium-doped aluminum nitride (AlScN) has generated great research interest owing to
its unique properties. The wurtzite-structure AlScN is compatible with the complementary …

Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes

T Luo, Q Xu, Z Wen, Y Qu, J Zhou, B Lin… - IEEE Electron …, 2023 - ieeexplore.ieee.org
Spurious modes (SMs) suppression and electromechanical coupling coefficient ()
improvement in Lamb wave resonators (LWRs) have always been the research hotspot. In …

Micro-force sensing techniques and traceable reference forces: A review

Y Yang, M Zhao, H Yinguo, H Zhang… - Measurement …, 2022 - iopscience.iop.org
Micro-force measurement with high resolution, accuracy, and reliability is of interest in a
broad range of applications including gravitational-wave detection, intelligent healthcare …

Advancements in one-port surface acoustic wave (SAW) resonators for sensing applications: A review

CK Kent, N Ramakrishnan… - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
Surface acoustic wave (SAW) devices have long been recognized as proficient sensors,
capable of detecting an array of chemical and physical parameters. These range from the …

AlN/Sapphire-based SAW resonators with Q over 10000 for temperature sensors

Y Ai, H Lv, Y Huang, J He, Y Wang, J Wu… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
A surface acoustic wave (SAW) resonator with quality factors () of 3526/10 205 at the
resonant/antiresonant frequencies () has been fabricated on thick metal-organic chemical …

[HTML][HTML] Development of temperature sensor based on AlN/ScAlN SAW resonators

M Wei, Y Liu, Y Qu, X Gu, Y Wang, W Liu, Y Cai, S Guo… - Electronics, 2023 - mdpi.com
Temperature monitoring in extreme environments presents new challenges for MEMS
sensors. Since aluminum nitride (AlN)/scandium aluminum nitride (ScAlN)-based surface …

Experimental and theoretical studies of effective piezoelectric coefficients of 2-2 connectivity AlN/AlScN composite piezoelectric films

X Gu, Y Liu, Y Qu, L Li, Y Cai, J Ding, T Yu… - Composites …, 2023 - Elsevier
Abstract Aluminum nitride (AlN) and Sc-doped AlN have become the most popular
piezoelectric thin-film materials in the fields of RF and smart sensing. AlN/AlScN composite …

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

T Lu, X Fang, S Zhang, Y Yuan, Y Ji, H Zhang… - Applied Physics …, 2023 - pubs.aip.org
One approach to extend the acoustic applications of aluminum nitride (AlN) in the GHz
frequency range is to take advantage of the piezoelectric performance and high acoustic …