Research and analysis of MEMS switches in different frequency bands

W Tian, P Li, LX Yuan - Micromachines, 2018 - mdpi.com
Due to their high isolation, low insertion loss, high linearity, and low power consumption,
microelectromechanical systems (MEMS) switches have drawn much attention from …

Paradigm phase shift: RF MEMS phase shifters: An overview

A Chakraborty, B Gupta - IEEE Microwave Magazine, 2016 - ieeexplore.ieee.org
Microelectromechanical systems (MEMS) have been familiar in the field of microelectronics
and device technology since 1965, when Harvey C. Nathanson invented the first MEMS …

Analytical approach in the development of RF MEMS switches

IE Lysenko, AV Tkachenko, EV Sherova, AV Nikitin - Electronics, 2018 - mdpi.com
Currently, the technology of microelectromechanical systems is widely used in the
development of high-frequency and ultrahigh-frequency devices. The most important …

Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization

LN Thalluri, K Guha, K Srinivasa Rao… - Microsystem …, 2020 - Springer
In this communication, we have designed, simulated, performance improved, fabricated and
characterized a shunt capacitive RF MEMS switch with perforated serpentine membrane …

An intensive approach to optimize capacitive type RF MEMS shunt switch

PA Kumar, KS Rao, KG Sravani, B Balaji, M Aditya… - Microelectronics …, 2021 - Elsevier
Optimization of the RF MEMS switch is essential to enhance its performance characteristics
at high frequency Millimeterwave applications. Many optimization techniques have been …

High on/off capacitance ratio RF MEMS capacitive switches

H Wei, Z Deng, X Guo, Y Wang… - … of Micromechanics and …, 2017 - iopscience.iop.org
In this paper, high on/off capacitance ratio radio frequency micro-electro-mechanical-
systems (RF MEMS) switches are designed, fabricated, measured and analyzed. Two types …

Material selection of RF-MEMS switch used for reconfigurable antenna using ashby's methodology

AK Sharma, N Gupta - progress in electromagnetics research letters, 2012 - jpier.org
This paper reports material selection methodology for radio frequency-micro electro
mechanical systems (RF-MEMS) switches used for reconfigurable antennas. As there are …

On the influence of environment gases, relative humidity and gas purification on dielectric charging/discharging processes in electrostatically driven MEMS/NEMS …

U Zaghloul, B Bhushan, P Pons… - …, 2010 - iopscience.iop.org
In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …

Dual-band class III loaded-line phase shifters

X Tang, K Mouthaan - 2010 Asia-Pacific Microwave Conference, 2010 - ieeexplore.ieee.org
A design method for dual-band Class III loaded-line phase shifters is presented. The center
line and the loads of the phase shifter are designed to meet dual-band requirements. Two …

Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques

U Zaghloul, M Koutsoureli, H Wang, F Coccetti… - Microelectronics …, 2010 - Elsevier
The present work investigates the results of different characterization methods for the
dielectric charging phenomenon applicable to metal–insulator–metal (MIM) capacitors and …