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High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate
microstructures for various applications in the field of microelectromechanical systems …
microstructures for various applications in the field of microelectromechanical systems …
A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching
P Pal, K Sato - Micro and Nano Systems Letters, 2015 - Springer
Wet anisotropic etching based silicon micromachining is an important technique to fabricate
freestanding (eg cantilever) and fixed (eg cavity) structures on different orientation silicon …
freestanding (eg cantilever) and fixed (eg cavity) structures on different orientation silicon …
[BOK][B] Foundations of nanomechanics: from solid-state theory to device applications
AN Cleland - 2013 - books.google.com
Why write another book on mechanics? There are, after all, a number of excellent texts that
describe in great detail the way classical solids behave when acted upon by static and time …
describe in great detail the way classical solids behave when acted upon by static and time …
Flexible and semi-transparent silicon solar cells as a power supply to smart contact lenses
Supplying electric power to wearable IoT devices, particularly smart contact lenses (SCLs),
is one of the main obstacles to widespread adoption and commercialization. In the present …
is one of the main obstacles to widespread adoption and commercialization. In the present …
[BOK][B] Silicon wet bulk micromachining for MEMS
P Pal, K Sato - 2017 - taylorfrancis.com
Microelectromechanical systems (MEMS)-based sensors and actuators have become
remarkably popular in the past few decades. Rapid advances have taken place in terms of …
remarkably popular in the past few decades. Rapid advances have taken place in terms of …
Abnormal silicon etching behaviors in nanometer-sized channels
Modern semiconductor fabrication is challenged by difficulties in overcoming physical and
chemical constraints. A major challenge is the wet etching of dummy gate silicon, which …
chemical constraints. A major challenge is the wet etching of dummy gate silicon, which …
Surface structure dependence of mechanochemical etching: Scanning probe-based nanolithography study on Si (100), Si (110), and Si (111)
We employed a scanning probe-based lithography process on single-crystalline Si (100), Si
(110), and Si (111) surfaces and studied the effects of crystallographic surface structures on …
(110), and Si (111) surfaces and studied the effects of crystallographic surface structures on …
Interplay between solution chemistry and mechanical activation in friction-induced material removal of silicon surface in aqueous solution
Shear-induced chemical etching reactions of single-crystalline Si (100), Si (110), and Si
(111) surfaces were studied in acidic, neutral, and basic aqueous solutions. Measuring the …
(111) surfaces were studied in acidic, neutral, and basic aqueous solutions. Measuring the …
Comparison of etch characteristics of KOH, TMAH and EDP for bulk micromachining of silicon (110)
Bulk micromachining in Si (110) wafer is an essential process for fabricating vertical
microstructures by wet chemical etching. We compared the anisotropic etching properties of …
microstructures by wet chemical etching. We compared the anisotropic etching properties of …
[HTML][HTML] An automated and unbiased grain segmentation method based on directional reflectance microscopy
Identifying individual grains from sectioned polycrystalline metals is a foundational task of
microstructure analysis. However, traditional grain segmentation methods applied to optical …
microstructure analysis. However, traditional grain segmentation methods applied to optical …