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Piezeoelectric micromachined ultrasound tranducer array for photoacoustic imaging
W Liao, W Liu, JE Rogers, F Usmani… - 2013 Transducers & …, 2013 - ieeexplore.ieee.org
A piezoelectric micromachined ultrasonic transducer (pMUT) array designed for
photoacoustic imaging is presented in this paper. Two-dimensional pMUT arrays containing …
photoacoustic imaging is presented in this paper. Two-dimensional pMUT arrays containing …
Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators
W Liao, W Liu, Y Tang, B Wang… - The 8th Annual IEEE …, 2013 - ieeexplore.ieee.org
This paper presents the design, fabrication and characterization of a novel tip-tilt-piston
(TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators …
(TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators …
Hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral shift-free piezoelectric unimorph actuator
This paper presents hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral
shift-free piezoelectric unimorph actuator. The accuracy and the level of performance of …
shift-free piezoelectric unimorph actuator. The accuracy and the level of performance of …
Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators
SS Evstafyev, SP Timoshenkov… - Micro+ Nano …, 2015 - spiedigitallibrary.org
Paper presents a structure of a micro-mirror element driven by thermal micro-actuators.
Micro-mirror dimensions are 100x100 um and it was manufactured by a surface …
Micro-mirror dimensions are 100x100 um and it was manufactured by a surface …