Piezeoelectric micromachined ultrasound tranducer array for photoacoustic imaging

W Liao, W Liu, JE Rogers, F Usmani… - 2013 Transducers & …, 2013‏ - ieeexplore.ieee.org
A piezoelectric micromachined ultrasonic transducer (pMUT) array designed for
photoacoustic imaging is presented in this paper. Two-dimensional pMUT arrays containing …

Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators

W Liao, W Liu, Y Tang, B Wang… - The 8th Annual IEEE …, 2013‏ - ieeexplore.ieee.org
This paper presents the design, fabrication and characterization of a novel tip-tilt-piston
(TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators …

Hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral shift-free piezoelectric unimorph actuator

W Liu, W Liao, K Jia, Y Zhu, H **e, B Wang… - Integrated …, 2014‏ - Taylor & Francis
This paper presents hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral
shift-free piezoelectric unimorph actuator. The accuracy and the level of performance of …

Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators

SS Evstafyev, SP Timoshenkov… - Micro+ Nano …, 2015‏ - spiedigitallibrary.org
Paper presents a structure of a micro-mirror element driven by thermal micro-actuators.
Micro-mirror dimensions are 100x100 um and it was manufactured by a surface …