Effect of flux rate on the growth of AlN films on sapphire by MNVPE

Y Song, H Zhang, X Lin, X **e, C Li, L Bian… - Materials Science in …, 2023 - Elsevier
Aluminum nitride (AlN) is an ideal material for the preparation of devices such as deep
ultraviolet light-emitting diodes (UV-LEDs) and vacuum detectors because of its wide …