[HTML][HTML] AlScN piezoelectric MEMS mirrors with large field of view for LiDAR application

Y Liu, L Wang, Y Su, Y Zhang, Y Wang, Z Wu - Micromachines, 2022‏ - mdpi.com
This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and
gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric …

imaging lidar by digital micromirror device

Y Takashima, B Hellman - Optical Review, 2020‏ - Springer
Applications of digital micromirror device for lidar are overviewed. A large Lagrange
invariant value makes DMD as one of the attractive beam steering transmitter and receiver …

Risley-prism-based multi-beam scanning LiDAR for high-resolution three-dimensional imaging

A Li, X Liu, J Sun, Z Lu - Optics and Lasers in Engineering, 2022‏ - Elsevier
Light detection and ranging (LiDAR) as a significant approach to three-dimensional
perception has increasingly suffered from challenges for compact structure, high resolution …

Single-chip holographic beam steering for lidar by a digital micromirror device with angular and spatial hybrid multiplexing

B Hellman, C Luo, G Chen, J Rodriguez, C Perkins… - Optics …, 2020‏ - opg.optica.org
A digital micromirror device (DMD) based holographic beam steering technique is reported
that multiplexes fine-steering binary amplitude gratings with a coarse-steering …

[HTML][HTML] Diffraction efficiency of MEMS phase light modulator, TI-PLM, for quasi-continuous and multi-point beam steering

X Deng, CI Tang, C Luo, Y Takashima - Micromachines, 2022‏ - mdpi.com
The recent development of the Micro Electromechanical System (MEMS) Phase Light
Modulator (PLM) enables fast laser beam steering for lidar applications by displaying a …

Liquid crystal-tunable optical phased array for LiDAR applications

K Nakamura, K Narumi, K Kikuchi… - Smart Photonic and …, 2021‏ - spiedigitallibrary.org
Optical phased arrays (OPAs) with the ability of dynamic beam-steering hold great promise
for LiDAR applications. In contrast to mechanical scanning, OPAs have the advantage of …

Cascaded-prism multi-mode beam scanning method for three-dimensional imaging lidar

X Liu, A Li, X Jiang, H Yang, Y Li - Applied Optics, 2024‏ - opg.optica.org
Light detection and ranging (lidar) has emerged as an indispensable approach to three-
dimensional (3D) perception, which probably suffers from performance limitations with …

Design and manufacturing of a highly integrated optical module for Tianwen-1 probe's landing LiDAR

Y Zhang, F Zhu, Y Zheng, L Wang, S Guo, B Hua… - Optics and Lasers in …, 2023‏ - Elsevier
In this study, a highly-integrated optical module based on micro-electromechanical system
(MEMS) mirror, glass with low thermal expansion coefficient, a higher-order aspheric lens …

Fast laser beam steering into multiple diffraction orders with a single digital micromirror device for time-of-flight lidar

J Rodriguez, B Smith, B Hellman, Y Takashima - Applied Optics, 2020‏ - opg.optica.org
The sampling rate and angular resolution of diffraction-based beam steering employing a
digital micromirror device (DMD) can be simultaneously enhanced by at least an order of …

[HTML][HTML] All-MEMS lidar using hybrid optical architecture with digital micromirror devices and a 2D-MEMS mirror

E Kang, H Choi, B Hellman, J Rodriguez, B Smith… - Micromachines, 2022‏ - mdpi.com
In a lidar system, replacing moving components with solid-state devices is highly anticipated
to make a reliable and compact lidar system, provided that a substantially large beam area …