Many applications of ultrasound for sensing, actuation and imaging require miniaturized and
low power transducers and transducer arrays integrated with electronic systems …

The objective of this article is to review the recent advancement in piezoelectric
micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric …

This paper presents high fill-factor piezoelectric micromachined ultrasonic transducer
(PMUT) arrays fabricated via a novel process using cavity SOI wafers. The simple three …

In this study, we fabricated a row-column addressed 2-dimensional piezoelectric
micromachined ultrasonic transducer (pMUT) array based on the monocrystalline Pb (Zr, Ti) …

Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly
developed in the last decade. With high output pressure to enable long-range detection and …

With the increasing use of ultrasonography, especially in medical imaging, novel fabrication
techniques together with novel sensor designs are needed to meet the requirements for …

This work demonstrates the ultrasonic imaging ability of piezoelectric micromachined
ultrasonic transducer (PMUT) for the detection of defects deep in solids by total-focus …

Thin-film PMUTs have been important research topics among microultrasound experts, and
a concise review on their research progress is reported herein. Through rigorous surveying …

This study presents the fabrication and characterization of a piezoelectric micromachined
ultrasonic transducer (pMUT; radius: 40 µm) using a patterned aluminum nitride (AlN) thin …

Flexible ultrasonic transducers have attracted much attention in industrial and biomedical
applications. However, most of them are fabricated based on a single substrate by complex …