Electron-beam synthesis of dielectric coatings using forevacuum plasma electron sources

YG Yushkov, EM Oks, AV Tyunkov, DB Zolotukhin - Coatings, 2022 - mdpi.com
This is a review of current developments in the field of ion-plasma and beam methods of
synthesis of protective and functional dielectric coatings. We give rationales for …

Electron beam generated plasmas for the processing of graphene

SG Walton, SC Hernández, DR Boris… - Journal of Physics D …, 2017 - iopscience.iop.org
Abstract The Naval Research Laboratory (NRL) has developed a processing system based
on an electron beam-generated plasma and applied it to the processing of graphene. Unlike …

Electron beam generated plasmas for ultra low Te processing

SG Walton, DR Boris, SC Hernández… - ECS Journal of Solid …, 2015 - iopscience.iop.org
Abstract The Naval Research Laboratory (NRL) has developed a processing system based
on an electron beam-generated plasma. Unlike conventional discharges produced by …

Generation of high-power-density electron beams by a forevacuum-pressure plasma-cathode electron source

IY Bakeev, AS Klimov, EM Oks… - Plasma Sources Science …, 2018 - iopscience.iop.org
We report on our work directed towards increasing the power density of the focused electron
beam produced by a forevacuum-pressure plasma-cathode electron beam source at a …

Electron-beam-generated plasmas for materials processing

SG Walton, C Muratore, D Leonhardt… - Surface and Coatings …, 2004 - Elsevier
The results of investigations aimed at characterizing pulsed, electron-beam-produced
plasmas for use in materials processing applications are discussed. In situ diagnostics of the …

Generation of uniform electron beam plasma in a dielectric flask at fore-vacuum pressures

DB Zolotukhin, VA Burdovitsin… - Plasma Sources Science …, 2015 - iopscience.iop.org
We describe a system for the generation of spatially uniform and homogeneous dense
plasma in a dielectric flask using a forevacuum-pressure plasma-cathode electron beam …

Applications of electron-beam generated plasmas to materials processing

D Leonhardt, C Muratore… - IEEE transactions on …, 2005 - ieeexplore.ieee.org
Nonequilibrium (T/sub e//spl Gt/T/sub ion, gas/) plasma processing often allows for greater
process control with reduced environmental impact when compared to other materials …

Fundamentals and applications of a plasma-processing system based on electron-beam ionization

D Leonhardt, SG Walton, RF Fernsler - Physics of plasmas, 2007 - pubs.aip.org
Plasmas generated from moderate energy (2–5 keV) electron beams (e-beam) have unique,
attractive characteristics that are ideal for materials processing applications. These plasmas …

Surface modification of steel surfaces by electron beam excited plasma processing

P Abraha, Y Yoshikawa, Y Katayama - Vacuum, 2008 - Elsevier
The nitriding performance of low power electron beam excited plasma is investigated by
characterizing the surface of nitrided low alloy Cr–Mo steels. In this research, a particular …

Parameters of the beam plasma formed by a forevacuum plasma source of a ribbon beam in zero-field transportation system

AS Klimov, MI Lomaev, EM Oks, AP Andreichik - Technical Physics, 2017 - Springer
We have studied the generation of the beam plasma formed by a forevacuum plasma source
of a ribbon electron beam in the conditions of its transportation without an accompanying …