Advances in laboratory-scale ptychography using high harmonic sources
Extreme ultraviolet microscopy and wavefront sensing are key elements for next-generation
ultrafast applications, such as chemically-resolved imaging, focal spot diagnostics in pump …
ultrafast applications, such as chemically-resolved imaging, focal spot diagnostics in pump …
Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry
Next-generation nano-and quantum devices have increasingly complex 3D structure. As the
dimensions of these devices shrink to the nanoscale, their performance is often governed by …
dimensions of these devices shrink to the nanoscale, their performance is often governed by …
Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography
We demonstrate the first (to our knowledge) general purpose full-field reflection-mode
extreme ultraviolet (EUV) microscope based on coherent diffractive imaging. This …
extreme ultraviolet (EUV) microscope based on coherent diffractive imaging. This …
[HTML][HTML] High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography
Scanning electron microscopy and atomic force microscopy are well-established techniques
for imaging surfaces with nanometer resolution. Here we demonstrate a complementary and …
for imaging surfaces with nanometer resolution. Here we demonstrate a complementary and …
Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy
Due to the diffraction limited resolution and the presence of speckle noise, visible laser light
is generally thought to be impractical for finding deep subwavelength defects in patterned …
is generally thought to be impractical for finding deep subwavelength defects in patterned …
Ptychographic hyperspectral spectromicroscopy with an extreme ultraviolet high harmonic comb
We report a proof-of-principle demonstration of a new scheme of spectromicroscopy in the
extreme ultraviolet (EUV) spectral range, where the spectral response of the sample at …
extreme ultraviolet (EUV) spectral range, where the spectral response of the sample at …
Table-top nanoscale coherent imaging with XUV light
Modern laser-based XUV light sources provide very high photon fluxes which have
previously only been available at large scale facilities. This allows high-performance XUV …
previously only been available at large scale facilities. This allows high-performance XUV …
Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source
We demonstrate temporally multiplexed multibeam ptychography implemented for the first
time in the EUV, by using a high harmonic based light source. This allows for simultaneous …
time in the EUV, by using a high harmonic based light source. This allows for simultaneous …
Full-field imaging of thermal and acoustic dynamics in an individual nanostructure using tabletop high harmonic beams
Imaging charge, spin, and energy flow in materials is a current grand challenge that is
relevant to a host of nanoenhanced systems, including thermoelectric, photovoltaic …
relevant to a host of nanoenhanced systems, including thermoelectric, photovoltaic …
Quantitative chemically specific coherent diffractive imaging of reactions at buried interfaces with few nanometer precision
We demonstrate quantitative, chemically specific imaging of buried nanostructures,
including oxidation and diffusion reactions at buried interfaces, using nondestructive …
including oxidation and diffusion reactions at buried interfaces, using nondestructive …