Anisotropic wet etching of silicon (Si) has been known for decades, but the extraordinary
capabilities of this technology to provide highly ordered microphotonic arrays have received …

Light loss is one of the main factors affecting the quantum efficiency of photodetectors.
Several approaches have been proposed to mitigate light loss and improve the quantum …

Silicon has been commonly used in the microelectromechanical systems (MEMS)
community for the past sixty years, and anisotropic wet etching with tetramethylammonium …

Collection of light in photodetector focal plane arrays (FPAs) can be enhanced by
microlenses or metasurfaces. We propose an alternative approach based on using …

One of the challenges of mid-wave infrared (MWIR) silicon (Si) photonics is related to the
low absorption of Si-based photodetector focal plane arrays (FPAs), and therefore the …

It is shown that due to high speed and large volume of production, anisotropic wet etching of
Si is a unique method of manufacturing high quality micropyramidal arrays for silicon …

Light-concentrating truncated Si micropyramidal arrays with 54.7 degree sidewall angles
were successfully integrated with PtSi Schottky barrier photodetectors. Four different devices …

This research was devoted to modeling of the optical properties of Si micropyramids aimed
at designing optimal structures for applications as light concentrators in mid-wave infrared …

This dissertation is devoted to the optical properties of mesoscale and nanoscale photonic
arrays, specifically regarding two different areas: i) silicon (Si) micropyramidal photonics …

Si anisotropic wet etching is applied to fabricate massive parallel microstructure arrays with
novel optical properties. They can be used for enhancing light-concentration properties of …