The modification of classical Twyman-Green interferometer by implementation of Liquid
Crystal on Silicon (LCoS) spatial light modulator as the reference mirror allows introducing …

In this paper we present a new family of MOEMS device, which can be used as high
resolution optical resonant pressure sensor. The architecture contains a membrane loaded …

In this paper authors show the application of low coherence interferometry and optical
coherence tomography with non-Gaussian light source, which are applicable in …

The active Twyman-Green laser interferometer for MEMS measurement equipped with
Spatial Light Modulator (SLM) as a reference element is reported. The SLM is electrically …

There is a great need for techniques that will permit the evaluation of MEMS devices, in all
stages of manufacturing, with respect to material and micromechanical properties. In this …

In this thesis, the design, fabrication and characterization of a lamellar grating based Fourier
transform micro-spectrometer are reported. Compared to conventional Fourier transform …

The ability to experimentally characterize static and dynamic deformation effects is crucial to
the development of actuated MEMS and MOEMS devices. Almost all technological …

Conclusions This paper describe design and investigations of a MOEMS family
measurement devices based on light propagation via SiO x N y waveguide structures …

Micro-Electro-Mechanical Systems are nowadays frequently used in many fields of industry.
The number of their applications increases and their functions become more responsible …

Abstract Micro-Electro-Mechanical Systems are nowadays frequently used in many fields of
industry. The number of their applications increases and their functions became more …