The majority of microelectromechanical system (MEMS) devices must be combined with
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …

Multidimensional integration and multifunctional component assembly have been greatly
explored in recent years to extend Moore's Law of modern microelectronics. However, this …

Microfabrication technologies initially developed for integrated electronics have been
successfully applied to batch-fabricate a wide variety of micromechanical structures for …

Flexible thermoelectric materials have attracted increasing interest because of their potential
use in thermal energy harvesting and high‐spatial‐resolution thermal management …

Micromechanical resonators are promising replacements for quartz crystals for timing and
frequency references owing to potential for compactness, integrability with CMOS fabrication …

We have developed a single-wafer vacuum encapsulation for microelectromechanical
systems (MEMS), using a thick (20-mum) polysilicon encapsulation to package …

Recognition of body posture and motion is an important physiological function that can keep
the body in balance. Man-made motion sensors have also been widely applied for a broad …