US8877648B2 - Methods of forming printable integrated circuit devices by selective etching to
suspend the devices from a handling substrate and devices formed thereby - Google Patents …

US9762202B2 - Method of manufacturing a mechanical resonating structure - Google Patents
US9762202B2 - Method of manufacturing a mechanical resonating structure - Google Patents …

BACKGROUND MEMS relate to a technology of very small electrically driven mechanical
devices. MEMS converges at the nano scale with NEMS and nanotechnology in general …

Devices having piezoelectric material structures integrated with substrates are described.
Fabrication techniques for forming Such devices are also described. The fabrication may …

6,897,537 6,917,086 7,008,812 7,019,434 7,064,637 7,138,745 7,180,145 7,294.282
7,299,538 7,344,907 7,361,962 7.388, 316 7,394,332 7,402,449 7,545,622 7,579,663 …

US9383208B2 - Electromechanical magnetometer and applications thereof - Google Patents
US9383208B2 - Electromechanical magnetometer and applications thereof - Google Patents …

(57) ABSTRACT A Micro-Electro-Mechanical System (MEMS). The MEMS includes a lower
chamber with a wiring layer and an upper chamber which is connected to the lower …

(57) ABSTRACT A method of forming at least one Micro-Electro-Mechanical System (MEMS)
cavity includes forming a first sacrificial cavity layer over a wiring layer and substrate. The …

Mechanical resonators are physical structures that are designed to vibrate at high
frequencies. Such resonators may be incorporated into a variety of devices Such as timing …

(57) ABSTRACT A method of forming at least one Micro-Electro-Mechanical System (MEMS)
cavity includes forming a first sacrificial cavity layer over a lower wiring layer. The method …