Radio frequency (RF) microelectromechanical systems (MEMS) based on Al1–x Sc x N are
replacing AlN-based devices because of their higher achievable bandwidths, suitable for the …

Wireless local area network (WLAN) has gained widespread application as a convenient
network access method, demanding higher network efficiency, stability, and responsiveness …

This article proposes an ultrasonic sensor inspired by the shape of a bat's cochlea, which is
part of one of the most sophisticated echolocation systems to be found among mammals. In …

This paper introduces a piezoelectric ring resonator, comprising a Mo-ScAlN-Mo sandwich
structure and shaped into a ring with a hollow center. The vibrational modes of the resonator …

With the rapid development of 5G and MicroElectro-Mechanical System (MEMS) technology,
piezoelectric film bulk acoustic resonators (FBARs) have gradually become one of the …

Thin Film Bulk Acoustic Resonator (FBAR) is a device consisting of a piezoelectric material
sandwiched between two electrodes and acoustically decoupled from the surrounding …

This work investigates the effect of Bragg's reflector configuration stages and its material on
the performance of flexible FBAR sensor. Bragg's reflector configuration has been formed …

Acoustic wave devices have played a key role in communication and sensing applications
for several decades. They will continue to have a major impact on new generations of …

This work builds a Modified Mason model and extracts the parameters of the Parasitic
Modified Butterworth-Van Dyke (PMBVD) from the resonance curves, which can simulate the …

This work investigates the effect of Bragg's reflector configuration stages and its material on
the performance of flexible FBAR sensor. Bragg's reflector configuration has been formed …