Versatile Landscape of Low-k Polyimide: Theories, Synthesis, Synergistic Properties, and Industrial Integration

X Dong, B Wan, JW Zha - Chemical Reviews, 2024 - ACS Publications
The development of microelectronics and large-scale intelligence nowadays promotes the
integration, miniaturization, and multifunctionality of electronic and devices but also leads to …

Diamond-like amorphous carbon

J Robertson - Materials science and engineering: R: Reports, 2002 - Elsevier
Diamond-like carbon (DLC) is a metastable form of amorphous carbon with significant sp3
bonding. DLC is a semiconductor with a high mechanical hardness, chemical inertness, and …

Low dielectric constant materials

W Volksen, RD Miller, G Dubois - Chemical reviews, 2010 - ACS Publications
Modern computer microprocessor chips are marvels of engineering complexity. For the
current 45 nm technology node, there may be nearly a billion transistors on a chip barely 1 …

Materials quest for advanced interconnect metallization in integrated circuits

JH Moon, E Jeong, S Kim, T Kim, E Oh, K Lee… - Advanced …, 2023 - Wiley Online Library
Integrated circuits (ICs) are challenged to deliver historically anticipated performance
improvements while increasing the cost and complexity of the technology with each …

Low dielectric constant materials for microelectronics

K Maex, MR Baklanov, D Shamiryan, F Lacopi… - Journal of Applied …, 2003 - pubs.aip.org
The ever increasing requirements for electrical performance of on-chip wiring has driven
three major technological advances in recent years. First, copper has replaced Aluminum as …

Probing surface and interface morphology with grazing incidence small angle X-ray scattering

G Renaud, R Lazzari, F Leroy - Surface Science Reports, 2009 - Elsevier
Nanoscience and nanotechnology are tremendously increasing fields of research that aim at
producing, characterizing and understanding nanoobjects and assemblies of nanoobjects …

Facile Strategy for Intrinsic Low-k Dielectric Polymers: Molecular Design Based on Secondary Relaxation Behavior

C Qian, R Bei, T Zhu, W Zheng, S Liu, Z Chi… - …, 2019 - ACS Publications
An original design strategy for the preparation of polymers with a low dielectric constant is
presented. The key to this design strategy is taking the most advantage of the secondary …

Direct low-temperature nanographene CVD synthesis over a dielectric insulator

MH Rummeli, A Bachmatiuk, A Scott, F Borrnert… - ACS …, 2010 - ACS Publications
Graphene ranks highly as a possible material for future high-speed and flexible electronics.
Current fabrication routes, which rely on metal substrates, require post-synthesis transfer of …

Research progress on porous low dielectric constant materials

M **e, M Li, Q Sun, W Fan, S **a, W Fu - Materials Science in …, 2022 - Elsevier
With the rapid development of ultra-large-scale integration (ULSI) of integrated circuits, the
feature size of the silicon chip continues shrinking and the physical gate length is …

A bulk dielectric polymer film with intrinsic ultralow dielectric constant and outstanding comprehensive properties

Y Liu, C Qian, L Qu, Y Wu, Y Zhang, X Wu… - Chemistry of …, 2015 - ACS Publications
A bulk dielectric polymer film with an intrinsic ultralow k value of 1.52 at 10 kHz has been
successfully synthesized based on a novel polyimide FPTTPI. More importantly, such …