Site-controlled and advanced epitaxial Ge/Si quantum dots: Fabrication, properties, and applications

M Brehm, M Grydlik - Nanotechnology, 2017 - iopscience.iop.org
In this review, we report on fabrication paths, challenges, and emerging solutions to
integrate group-IV epitaxial quantum dots (QDs) as active light emitters into the existing …

Enhanced telecom emission from single group-IV quantum dots by precise CMOS-compatible positioning in photonic crystal cavities

M Schatzl, F Hackl, M Glaser, P Rauter, M Brehm… - ACS …, 2017 - ACS Publications
Efficient coupling to integrated high-quality-factor cavities is crucial for the employment of
germanium quantum dot (QD) emitters in future monolithic silicon-based optoelectronic …

Recipes for the fabrication of strictly ordered Ge islands on pit-patterned Si (001) substrates

M Grydlik, G Langer, T Fromherz, F Schäffler… - …, 2013 - iopscience.iop.org
We identify the most important parameters for the growth of ordered SiGe islands on pit-
patterned Si (001) substrates. From a multi-dimensional parameter space we link individual …

One-stage formation of two-dimensional photonic crystal and spatially ordered arrays of self-assembled ge (Si) nanoislandson pit-patterned silicon-on-insulator …

AV Novikov, ZV Smagina, MV Stepikhova, VA Zinovyev… - Nanomaterials, 2021 - mdpi.com
A new approach to improve the light-emitting efficiency of Ge (Si) quantum dots (QDs) by the
formation of an ordered array of QDs on a pit-patterned silicon-on-insulator (SOI) substrate is …

Single germanium quantum dot embedded in photonic crystal nanocavity for light emitter on silicon chip

C Zeng, Y Ma, Y Zhang, D Li, Z Huang, Y Wang… - Optics …, 2015 - opg.optica.org
A silicon light emitter in telecom-band based on a single germanium quantum dot precisely
embedded in a silicon photonic crystal nanocavity is fabricated by a scalable method. A …

In-situ annealing and hydrogen irradiation of defect-enhanced germanium quantum dot light sources on silicon

L Spindlberger, J Aberl, A Polimeni, J Schuster… - Crystals, 2020 - mdpi.com
While light-emitting nanostructures composed of group-IV materials fulfil the mandatory
compatibility with CMOS-fabrication methods, factors such as the structural stability of the …

How pit facet inclination drives heteroepitaxial island positioning on patterned substrates

G Vastola, M Grydlik, M Brehm, T Fromherz… - Physical Review B …, 2011 - APS
We demonstrate the possibility of growing SiGe islands on patterned Si (001) substrates with
pits having a continuous variation of the sidewall inclination angle α from α∼ 4° to α∼ 54° …

Commensurate germanium light emitters in silicon-on-insulator photonic crystal slabs

R Jannesari, M Schatzl, F Hackl, M Glaser, K Hingerl… - Optics express, 2014 - opg.optica.org
We report on the fabrication and characterization of silicon-on-insulator (SOI) photonic
crystal slabs (PCS) with commensurately embedded germanium quantum dot (QD) emitters …

The influence of a Si cap on self-organized SiGe islands and the underlying wetting layer

M Brehm, M Grydlik, H Groiss, F Hackl… - Journal of Applied …, 2011 - pubs.aip.org
For the prototypical SiGe/Si (001) Stranski-Krastanow (SK) growth system, the influence of
intermixing caused by the deposition of a Si cap layer at temperatures T cap between 300 C …

Photoluminescence enhancement through vertical stacking of defect-engineered Ge on Si quantum dots

H Groiss, L Spindlberger, P Oberhumer… - Semiconductor …, 2017 - iopscience.iop.org
In this work, we show that the room-temperature photoluminescence intensity from Ge ion-
bombarded (GIB) epitaxial Ge on Si quantum dots (QD) can be improved by their vertical …