Since the proposal of moving horizon (MH) estimation in 1960s, the MH estimation approach
has drawn ever-increasing research interests due mainly to its inherent capability of …

Abstract Run-to-run (R2R) control is widely used in semiconductor manufacturing systems to
minimize the process drift, shift and variability. The R2R controller adjusts control actions or …

This work considers a seeded fesoterodine fumarate (FF) cooling crystallization and
presents the methodology and implementation of a real‐time machine learning modeling …

In this paper, the resilient filtering problem is investigated for a class of linear time-varying
repetitive processes with communication constraints. The communication between the …

In this work, we focus on the development of a multiscale modeling and run-to-run control
framework with the purpose of improving thin film product quality in a batch-to-batch plasma …

This work develops a first-principles-based three-dimensional, multiscale computational
fluid dynamics (CFD) model, together with reactor geometry optimizations, of SiO 2 thin-film …

Dramatic advancements and adoption of computing capabilities, communication
technologies, and advanced, pervasive sensing have impacted every aspect of modern …

This paper explores the application of optimal design and operational strategies under
uncertainty to a transient multiscale catalytic flow reactor system. The catalytic reactor is …

Plasma-enhanced atomic layer deposition (PEALD) is one of the most widely adopted
deposition methods in the semiconductor industry. It is chosen largely due to its superior …

Mammalian cells produce up to 80% of the commercially available therapeutic proteins, with
Chinese Hamster Ovary (CHO) cells being the primary production host. Manufacturing …