A scanning electron microscope (SEM) provides real-time imaging with nanometer
resolution and a large scanning area, which enables the development and integration of …

Studies on the hydrodynamics of underwater flexible structures are gaining significant
attention. To improve the performance and stability of underwater flexible structures in …

Nanopositioning is a key enabling technology for imaging, manipulation, measurement and
fabrication of matters at the nanoscale. Positioners driven by piezoelectric actuators are …

Realization of micro-scale tracking accuracy and efficient utilization of the communication
channel is crucial to the wide application of piezoelectric-driven micropositioning stages …

This article presents a new fractional-order normalized Bouc–Wen (BW)(FONBW) model to
describe the asymmetric and rate-dependent hysteresis nonlinearity of piezoelectric …

The micro/nano positioning system discussed in this paper includes a piezoelectric actuator
(PEA) and flexure-hinge-based positioning mechanism. Due to the existence of the …

Piezoelectric-actuated stick-slip device (PASSD) is a highly promising equipment that is
composed of one end-effector, one piezoelectric actuator (PEA) and one driving object …

This paper presents the mechanical design, computational optimization, and
experimentation of a decoupled 2-DOF monolithic mechanism. In the mechanical design …

The hysteresis of the piezoelectric actuator exhibits obvious rate dependence, especially in
fast scanning or tracking. This article proposes an adaptive hysteresis compensation method …

Piezoelectric actuators (PEAs) are widely used in high-precision positioning applications.
However, the inherent hysteresis nonlinearity seriously deteriorates the tracking …