MEMS switch is a movable device manufactured by means of semiconductor technology,
possessing many incomparable advantages such as a small volume, low power …

As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state
while the environmental accelerations satisfy threshold value. An exhaustive summary of the …

This paper presents a tunable multi-threshold micro-electromechanical inertial switch with
adjustable threshold capability. The demonstrated device combines the advantages of …

This paper presents the design, modeling, fabrication, and testing of a MEMS passive shock
sensor to record multiple threshold events with robust latching mechanism using mass …

This paper presents a multi-threshold inertial switch demonstrated experimentally and
through simulation. A laterally-driven multi-threshold inertial switch based on SOIMUMPs …

This paper presents a review of the recent advances on micromachined inertial
switches/triggers. The review focuses on their advantages and disadvantages, sensitive …

In this article, we present an inertial switch with three threshold levels, which can provide
quantitative acceleration measurements and detect the acceleration direction in the x–y …

We present a MEMS inertial switch with multiple, non-latching acceleration thresholds in two
directions, that consumes no power in its inactive state. The design implements a …

A microelectromechanical system (MEMS) inertial switch is both a sensor and an actuator by
only capturing a threshold and a close/open timestamp, yielding unique benefits like lower …

In order to solve the problem that the low-g omnidirectional MEMS inertial switches cannot
recognize the load direction, a nickel omnidirectional MEMS inertial switch with identifiable …