How to control defect formation in monolithic III/V hetero-epitaxy on (100) Si? A critical review on current approaches

B Kunert, Y Mols, M Baryshniskova… - Semiconductor …, 2018 - iopscience.iop.org
The monolithic hetero-integration of III/V materials on Si substrates could enable a multitude
of new device applications and functionalities which would benefit from both the excellent …

[KSIĄŻKA][B] Metalorganic vapor phase epitaxy (MOVPE): Growth, materials properties, and applications

S Irvine, P Capper - 2019 - books.google.com
Systematically discusses the growth method, material properties, and applications for key
semiconductor materials MOVPE is a chemical vapor deposition technique that produces …

Unique design approach to realize an O-band laser monolithically integrated on 300 mm Si substrate by nano-ridge engineering

D Colucci, M Baryshnikova, Y Shi, Y Mols… - Optics …, 2022 - opg.optica.org
We introduce a new design space for optimizing III-V devices monolithically grown on
Silicon substrates by extending the concept of nano-ridge engineering from binary …

Nano-ridge engineering of GaSb for the integration of InAs/GaSb heterostructures on 300 mm (001) Si

M Baryshnikova, Y Mols, Y Ishii, R Alcotte, H Han… - Crystals, 2020 - mdpi.com
Nano-ridge engineering (NRE) is a novel heteroepitaxial approach for the monolithic
integration of lattice-mismatched III-V devices on Si substrates. It has been successfully …

Coalescence of GaP on V-Groove Si Substrates

TE Saenz, JS Mangum, OD Schneble… - ACS Applied …, 2023 - ACS Publications
Here, we study the morphology and dislocation dynamics of metalorganic vapor phase
epitaxy (MOVPE)-grown GaP on a V-groove Si substrate. We show that Si from the substrate …

Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films

WE McMahon, M Vaisman, JD Zimmerman… - APL Materials, 2018 - pubs.aip.org
High crystalline quality semiconductor materials are critical for many electronic and
optoelectronic applications. As the need grows for material bandgaps beyond those of …

Nano-ridge laser monolithically grown on (001) Si

D Van Thourhout, Y Shi, M Baryshnikova, Y Mols… - Semiconductors and …, 2019 - Elsevier
Selective area growth of III–V compound materials into trenches fabricated on silicon (Si)
substrates allows to combine aspect ratio trap** with nano-ridge engineering (NRE). This …

Application of an sb surfactant in InGaAs nano-ridge engineering on 300 mm silicon substrates

B Kunert, R Alcotte, Y Mols, M Baryshnikova… - Crystal Growth & …, 2021 - ACS Publications
Nano-ridge engineering (NRE) is a novel heteroepitaxial integration approach for III–V
devices on Si substrates. It starts with selective area growth in narrow trenches for misfit …

Orbitrap™-SIMS analysis of advanced semiconductor inorganic structures

A Franquet, V Spampinato, S Kayser, W Vandervorst… - Vacuum, 2022 - Elsevier
Shrinking semiconductor device dimensions requires extensive R&D in all areas, inclusive
of the materials characterization techniques and methodologies commonly used. With …

Strain-compensated InGaAsP superlattices for defect reduction of InP grown on exact-oriented (001) patterned Si substrates by metal organic chemical vapor …

L Megalini, ST Šuran Brunelli, WO Charles, A Taylor… - Materials, 2018 - mdpi.com
We report on the use of InGaAsP strain-compensated superlattices (SC-SLs) as a technique
to reduce the defect density of Indium Phosphide (InP) grown on silicon (InP-on-Si) by Metal …