How to control defect formation in monolithic III/V hetero-epitaxy on (100) Si? A critical review on current approaches
B Kunert, Y Mols, M Baryshniskova… - Semiconductor …, 2018 - iopscience.iop.org
The monolithic hetero-integration of III/V materials on Si substrates could enable a multitude
of new device applications and functionalities which would benefit from both the excellent …
of new device applications and functionalities which would benefit from both the excellent …
[KSIĄŻKA][B] Metalorganic vapor phase epitaxy (MOVPE): Growth, materials properties, and applications
S Irvine, P Capper - 2019 - books.google.com
Systematically discusses the growth method, material properties, and applications for key
semiconductor materials MOVPE is a chemical vapor deposition technique that produces …
semiconductor materials MOVPE is a chemical vapor deposition technique that produces …
Unique design approach to realize an O-band laser monolithically integrated on 300 mm Si substrate by nano-ridge engineering
We introduce a new design space for optimizing III-V devices monolithically grown on
Silicon substrates by extending the concept of nano-ridge engineering from binary …
Silicon substrates by extending the concept of nano-ridge engineering from binary …
Nano-ridge engineering of GaSb for the integration of InAs/GaSb heterostructures on 300 mm (001) Si
M Baryshnikova, Y Mols, Y Ishii, R Alcotte, H Han… - Crystals, 2020 - mdpi.com
Nano-ridge engineering (NRE) is a novel heteroepitaxial approach for the monolithic
integration of lattice-mismatched III-V devices on Si substrates. It has been successfully …
integration of lattice-mismatched III-V devices on Si substrates. It has been successfully …
Coalescence of GaP on V-Groove Si Substrates
Here, we study the morphology and dislocation dynamics of metalorganic vapor phase
epitaxy (MOVPE)-grown GaP on a V-groove Si substrate. We show that Si from the substrate …
epitaxy (MOVPE)-grown GaP on a V-groove Si substrate. We show that Si from the substrate …
Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
High crystalline quality semiconductor materials are critical for many electronic and
optoelectronic applications. As the need grows for material bandgaps beyond those of …
optoelectronic applications. As the need grows for material bandgaps beyond those of …
Nano-ridge laser monolithically grown on (001) Si
Selective area growth of III–V compound materials into trenches fabricated on silicon (Si)
substrates allows to combine aspect ratio trap** with nano-ridge engineering (NRE). This …
substrates allows to combine aspect ratio trap** with nano-ridge engineering (NRE). This …
Application of an sb surfactant in InGaAs nano-ridge engineering on 300 mm silicon substrates
B Kunert, R Alcotte, Y Mols, M Baryshnikova… - Crystal Growth & …, 2021 - ACS Publications
Nano-ridge engineering (NRE) is a novel heteroepitaxial integration approach for III–V
devices on Si substrates. It starts with selective area growth in narrow trenches for misfit …
devices on Si substrates. It starts with selective area growth in narrow trenches for misfit …
Orbitrap™-SIMS analysis of advanced semiconductor inorganic structures
Shrinking semiconductor device dimensions requires extensive R&D in all areas, inclusive
of the materials characterization techniques and methodologies commonly used. With …
of the materials characterization techniques and methodologies commonly used. With …
Strain-compensated InGaAsP superlattices for defect reduction of InP grown on exact-oriented (001) patterned Si substrates by metal organic chemical vapor …
We report on the use of InGaAsP strain-compensated superlattices (SC-SLs) as a technique
to reduce the defect density of Indium Phosphide (InP) grown on silicon (InP-on-Si) by Metal …
to reduce the defect density of Indium Phosphide (InP) grown on silicon (InP-on-Si) by Metal …