The paper proposes an algorithm for safeness verification of a Petri net-based specification
of the control part of cyberphysical systems. The method involves a linear algebra technique …

Wafer acceptance test (WAT) is a key process of semiconductor manufacturing. The
collected testing parameters can be used in identification of wafer defects, improvement of …

With the reduction of wafer batch size on account of the diversification and individuation of
consumption demands, increasing importance has been attached to the schedulability and …

As wafer circuit widths shrink less than 10 nm, stringent quality control is imposed on the
wafer fabrication processes. Therefore, wafer residency time constraints and chamber …

Multi-cluster tools are increasingly being adopted for wafer production in semiconductor
fabrications. The current paper deals with single-armed linear multi-cluster tools connected …

Cluster tools, which are extensively used in semiconductor and display manufacturing, offer
the capability to perform multiple processing steps within a single tool. Many companies …

With the development of semiconductor technology, the fabrication process of integrated
circuits is complicated and expensive, and the testing of integrated circuits has become …

According to some experts, organizations make investments of huge sum of dollars
concerning firewalls, encryption, and other tightly closed access devices, yet it is all naught …

In semiconductor wafer fabrication, it is incredibly challenging to operate a multi-cluster tool
that is composed of several single-cluster tools. This paper deals with the scheduling …

This paper focuses on techniques for automatically anomaly detection of wafer acceptance
test (WAT) data from a production database based on Gaussian Mixture Model (GMM). An …