This report describes recent developments and current needs in the field of high-resolution
photopolymers and photomolecules briefly describing prior generation lithographic …

(57) ABSTRACT A system and method for anti-reflective layers is provided. In an
embodiment the anti-reflective layer comprises a floating additive in order to form a floating …

MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

Designed for science and engineering students, this text focuses on emerging trends in
processes for fabricating MEMS and NEMS devices. The book reviews different forms of …

US6316162B1 - Polymer and a forming method of a micro pattern using the same - Google
Patents US6316162B1 - Polymer and a forming method of a micro pattern using the same …

US patent application Ser. No. 08/992,033, Jung et al., filed Dec. 17, 1997. US patent
application Ser. No. 09/000,984, Jung et al., filed Dec. 30, 1997. US patent application Ser …

3.370, 047 A 2/1968 Raines 3,715,330 A 2/1973 Nogami et al. 4,011,386 A 3/1977
Matsumoto et al. 4,106,943 A 8/1978 Ikeda et al. 4,126,738 A 11/1978 Gaylord 4,202.955 A …

This new edition of the bestselling Microlithography: Science and Technology provides a
balanced treatment of theoretical and operational considerations, from elementary concepts …

The chemical amplification concept was invented at IBM Research and quickly brought into
use in the production of dynamic random access memory devices in the company. It has …

The ability to control function at the molecular level by means of external stimuli is one of the
key requirements for the development of “smart” devices and materials. In particular, the use …