Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …

Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

This chapter provides an introduction to the design, applications, and characteristics of
piezoelectric nanopositioning systems. Particular attention is paid to the characteristics that …

Precise actuation is a widely utilized technology in the realm of high-end equipment.
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …

Piezoelectric stage has become promising actuator for wide applications of micro-/nano-
positioning systems represented mathematically with Bouc–Wen hysteresis model to …

The nonlinearities hysteresis of the piezoelectric-PZT actuator can greatly degrade in
precise positioning applications. Therefore, modeling and identifying the hysteresis …

In this paper, we propose a new modeling and identification approach for piezoelectric-
actuated stages cascading hysteresis nonlinearity with linear dynamics, which is described …

The exhibition of hysteresis effects in smart actuators highly affect the accuracy and stability
of the control systems. The common approaches are the use of inverse hysteresis as a …

Twisted string actuators (TSAs) convert rotational motion from twisting into linear motion.
They are known for high energy efficiency, and large linear strain and stress outputs …

In this paper, a modified repetitive control (MRC) based approach is developed for high-
speed tracking of nanopositioning stages. First, the hysteresis nonlinearity is decomposed …