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CMOS-integrated aluminum nitride MEMS: A review
Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …
Piezoelectric microelectromechanical resonant sensors for chemical and biological detection
Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their
excellent mass resolution, have been studied for many applications, including DNA …
excellent mass resolution, have been studied for many applications, including DNA …
Thin film Lamb wave resonators in frequency control and sensing applications: a review
This work makes an overview of the progress made during the last decade with regard to a
novel class of piezoelectric microwave devices employing acoustic Lamb waves in …
novel class of piezoelectric microwave devices employing acoustic Lamb waves in …
5-10 GHz AlN contour-mode nanoelectromechanical resonators
This paper reports on the design and experimental verification of super high frequency
(SHF) laterally vibrating nanoelctromechanical (NEMS) resonators. For the first time, AlN …
(SHF) laterally vibrating nanoelctromechanical (NEMS) resonators. For the first time, AlN …
Multifrequency pierce oscillators based on piezoelectric AlN contour-mode MEMS technology
This paper reports on the first demonstration of multifrequency (176-, 222-, 307-, and 482-
MHz) oscillators based on the piezoelectric AlN contour-mode microelectromechanical …
MHz) oscillators based on the piezoelectric AlN contour-mode microelectromechanical …
VOCs sensors based on bulk acoustic resonators: a comprehensive review
In this paper, the hazardous effects of various volatile organic compounds (VOCs) on human
health and its detection methods have been discussed. This paper also presents the …
health and its detection methods have been discussed. This paper also presents the …
SWNT based nanosensors for wireless detection of explosives and chemical warfare agents
The detection of concealed explosives and chemical warfare agents is an urgent need to
protect the safety of people and cities around the world. This requires the development of …
protect the safety of people and cities around the world. This requires the development of …
Multi-frequency pierce oscillators based on piezoelectric AlN contour-mode MEMS resonators
This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482
MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the …
MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the …
[HTML][HTML] A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators
This study presents the effects of bottom electrode designs on the operation of laterally
vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs …
vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs …
[PDF][PDF] Lithographically defined aluminum nitride cross-sectional Lamé mode resonators
This paper reports on aluminum nitride (AlN) cross-sectional Lamé mode resonators
(CLMRs) showing high electromechanical coupling coefficient (kt 2) in excess of 4% in a …
(CLMRs) showing high electromechanical coupling coefficient (kt 2) in excess of 4% in a …