CMOS-integrated aluminum nitride MEMS: A review

RMR Pinto, V Gund, RA Dias… - Journal of …, 2022‏ - ieeexplore.ieee.org
Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …

Piezoelectric microelectromechanical resonant sensors for chemical and biological detection

W Pang, H Zhao, ES Kim, H Zhang, H Yu, X Hu - Lab on a Chip, 2012‏ - pubs.rsc.org
Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their
excellent mass resolution, have been studied for many applications, including DNA …

Thin film Lamb wave resonators in frequency control and sensing applications: a review

V Yantchev, I Katardjiev - Journal of Micromechanics and …, 2013‏ - iopscience.iop.org
This work makes an overview of the progress made during the last decade with regard to a
novel class of piezoelectric microwave devices employing acoustic Lamb waves in …

5-10 GHz AlN contour-mode nanoelectromechanical resonators

M Rinaldi, C Zuniga, G Piazza - 2009 IEEE 22nd International …, 2009‏ - ieeexplore.ieee.org
This paper reports on the design and experimental verification of super high frequency
(SHF) laterally vibrating nanoelctromechanical (NEMS) resonators. For the first time, AlN …

Multifrequency pierce oscillators based on piezoelectric AlN contour-mode MEMS technology

C Zuo, N Sinha, J Van der Spiegel… - Journal of …, 2010‏ - ieeexplore.ieee.org
This paper reports on the first demonstration of multifrequency (176-, 222-, 307-, and 482-
MHz) oscillators based on the piezoelectric AlN contour-mode microelectromechanical …

VOCs sensors based on bulk acoustic resonators: a comprehensive review

AK Johar, GK Sharma, JK Bhatt, A Kumar… - Microsystem …, 2024‏ - Springer
In this paper, the hazardous effects of various volatile organic compounds (VOCs) on human
health and its detection methods have been discussed. This paper also presents the …

SWNT based nanosensors for wireless detection of explosives and chemical warfare agents

Y Liu, CL Chen, Y Zhang, SR Sonkusale… - IEEE Sensors …, 2012‏ - ieeexplore.ieee.org
The detection of concealed explosives and chemical warfare agents is an urgent need to
protect the safety of people and cities around the world. This requires the development of …

Multi-frequency pierce oscillators based on piezoelectric AlN contour-mode MEMS resonators

C Zuo, N Sinha, J Van der Spiegel… - 2008 IEEE International …, 2008‏ - ieeexplore.ieee.org
This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482
MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the …

[HTML][HTML] A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators

SI Jung, C Ryu, G Piazza, HJ Kim - Micromachines, 2019‏ - mdpi.com
This study presents the effects of bottom electrode designs on the operation of laterally
vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs …

[PDF][PDF] Lithographically defined aluminum nitride cross-sectional Lamé mode resonators

G Chen, C Cassella, Z Qian, GE Hummel… - J. Micromech …, 2017‏ - scholar.archive.org
This paper reports on aluminum nitride (AlN) cross-sectional Lamé mode resonators
(CLMRs) showing high electromechanical coupling coefficient (kt 2) in excess of 4% in a …