System and method for apodization in a semiconductor device inspection system

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Annular apodizer for small target overlay measurement

I Gdor, Y Lubashevsky, AA Volfman, D Negri… - US Patent …, 2024 - Google Patents
Metrology is performed on a semiconductor wafer using a system with an apodizer. A spot is
formed on the semiconductor wafer with a diameter from 2 nm to 5 nm. The associated beam …
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Metrology apparatus and photonic crystal fiber

N Pandey - US Patent 11,675,276, 2023 - Google Patents
First worldwide family litigation filed litigation Critical https://patents. darts-ip. com/? family=
63294042&utm_source= google_patent&utm_medium= platform_link&utm_campaign …
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