Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes
Spurious modes (SMs) suppression and electromechanical coupling coefficient ()
improvement in Lamb wave resonators (LWRs) have always been the research hotspot. In …
improvement in Lamb wave resonators (LWRs) have always been the research hotspot. In …
Evaluation of the impact of abnormal grains on the performance of Sc0. 15Al0. 85N-based BAW resonators and filters
Sc x Al 1− x N is a promising piezoelectric material for radio frequency communication
applications with excellent electro-acoustic properties. However, the growth of abnormally …
applications with excellent electro-acoustic properties. However, the growth of abnormally …
Vertical and Lateral Etch Survey of Ferroelectric AlN/Al1−xScxN in Aqueous KOH Solutions
Due to their favorable electromechanical properties, such as high sound velocity, low
dielectric permittivity and high electromechanical coupling, Aluminum Nitride (AlN) and …
dielectric permittivity and high electromechanical coupling, Aluminum Nitride (AlN) and …
Miniaturized CO2 Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector
NDIR CO2 gas sensors using a 10-cm-long gas channel and CMOS-compatible 12% doped
ScAlN pyroelectric detector have previously demonstrated detection limits down to 25 ppm …
ScAlN pyroelectric detector have previously demonstrated detection limits down to 25 ppm …
Boosting Performance of SAW Resonator via AlN/ScAlN Composite Films and Dual Reflectors
Surface acoustic wave (SAW) resonators based on aluminum nitride (AlN)/scandium-doped
AlN (ScAlN) composite thin films with dual reflection structures demonstrate substantial …
AlN (ScAlN) composite thin films with dual reflection structures demonstrate substantial …
Analysis of Heterostructure Formation of Abnormally Oriented Grains in Sputter-Deposited AlScN Films and Its Impact on Bulk Acoustic Wave Devices
The presence of abnormally oriented grains (AOGs) in sputter-deposited aluminum
scandium nitride (AlScN) films significantly degrades their physical properties …
scandium nitride (AlScN) films significantly degrades their physical properties …
Effects of post-annealing on texture evolution of sputtered ScAlN films
M Li, B Chen, J **e, W Song… - 2020 IEEE International …, 2020 - ieeexplore.ieee.org
The piezoelectric response of the sputtered scandium aluminum nitride (ScAlN) film are
highly dependent on its crystallinity. The film texture continues to develop during the post …
highly dependent on its crystallinity. The film texture continues to develop during the post …
Evaluation of the impact of abnormally orientated grains on the performance of ScAlN-based laterally coupled alternating thickness (LCAT) mode resonators and …
Abnormally oriented grains (AOGs) widely exist in the Sc doped AlN films, especially for Sc
concentration more than 15%. In this work, the impact of the AOGs on the performance of …
concentration more than 15%. In this work, the impact of the AOGs on the performance of …
Experimental and theoretical studies of effective piezoelectric coefficients of 2-2 connectivity AlN/AlScN composite piezoelectric films
Abstract Aluminum nitride (AlN) and Sc-doped AlN have become the most popular
piezoelectric thin-film materials in the fields of RF and smart sensing. AlN/AlScN composite …
piezoelectric thin-film materials in the fields of RF and smart sensing. AlN/AlScN composite …