Laser thermal processing of group IV semiconductors for integrated photonic systems

O Aktas, AC Peacock - Advanced Photonics Research, 2021 - Wiley Online Library
In the quest to expand the functionality and capacity of group IV semiconductor photonic
systems, new materials and production methods are constantly being explored. In particular …

Thickness-dependent behavior of strain relaxation and Sn segregation of GeSn epilayer during rapid thermal annealing

H Cai, K Qian, Y An, G Lin, S Wu, H Ding… - Journal of Alloys and …, 2022 - Elsevier
The behavior of strain relaxation and Sn segregation of GeSn epilayers during growth and
thermal annealing is very complex depending on the growth method, thickness and Sn …

Ge0. 83Sn0. 17 p-channel metal-oxide-semiconductor field-effect transistors: Impact of sulfur passivation on gate stack quality

D Lei, W Wang, Z Zhang, J Pan, X Gong… - Journal of Applied …, 2016 - pubs.aip.org
Ge0.83Sn0.17 p-channel metal-oxide-semiconductor field-effect transistors: Impact of sulfur
passivation on gate stack quality | Journal of Applied Physics | AIP Publishing Skip to Main …

Recrystallization and interdiffusion processes in laser-annealed strain-relaxed metastable Ge0. 89Sn0. 11

S Abdi, S Assali, MRM Atalla, S Koelling… - Journal of Applied …, 2022 - pubs.aip.org
The prospect of GeSn semiconductors for silicon-integrated infrared optoelectronics brings
new challenges related to the metastability of this class of materials. As a matter of fact …

High‐Precision Wavelength Tuning of GeSn Nanobeam Lasers via Dynamically Controlled Strain Engineering

Y Kim, HJ Joo, M Chen, B Son, D Burt, X Shi… - Advanced …, 2023 - Wiley Online Library
The technology to develop a large number of identical coherent light sources on an
integrated photonics platform holds the key to the realization of scalable optical and …

Nanosecond laser annealing of pseudomorphic GeSn layers: Impact of Sn content

M Frauenrath, PA Alba, O Concepción, JH Bae… - Materials Science in …, 2023 - Elsevier
Interactions between nanosecond laser pulses and various Sn content pseudomorphic
GeSn layers were investigated. The aim was to evaluate the suitability of Ultraviolet …

Chemical bonding states and dopant redistribution of heavily phosphorus-doped epitaxial silicon films: Effects of millisecond laser annealing and do** …

HY Ryu, M Lee, H Park, DH Ko - Applied Surface Science, 2020 - Elsevier
We investigated the effect of millisecond (ms) laser annealing and do** concentration on
the chemical bonding states and dopant behaviors of P-doped epitaxial Si (Si: P) layers …

Boron-do** induced Sn loss in GeSn alloys grown by chemical vapor deposition

CE Tsai, FL Lu, PS Chen, CW Liu - Thin Solid Films, 2018 - Elsevier
Although the Sn content in GeSn can reach 10% using chemical vapor deposition, the
reduction of Sn content by in-situ boron do** and solid phase do** by chemical vapor …

Effects of tunable circuit parameters on pulsed discharge and input-output characteristics of a XeCl excimer laser

J Chen, Z Zhao, Z Liu, Y Fu - Journal of Physics D: Applied …, 2024 - iopscience.iop.org
High-pressure, pulsed discharge-pumped XeCl excimer lasers are operating in the
ultraviolet range at a wavelength of 308 nm. In this paper, a one-dimensional fluid model …

Single crystalline germanium-lead formed by laser-induced epitaxy

Q Zhou, EBL Ong, SL Lim, S Vajandar… - ECS Journal of Solid …, 2016 - iopscience.iop.org
Single crystalline germanium-lead (GePb) is formed using pulsed laser anneal (PLA). The
anneal was performed on an amorphous GePb layer (1.1 atomic percent of Pb) capped by …