A survey on the mechanical design for piezo-actuated compliant micro-positioning stages

B Ding, X Li, C Li, Y Li, SC Chen - Review of Scientific Instruments, 2023 - pubs.aip.org
This paper presents a comprehensive review of mechanical design and synthesis methods
for piezo-actuated compliant micro-positioning stages, which play an important role in areas …

Survey on recent designs of compliant micro-/nano-positioning stages

Z Wu, Q Xu - Actuators, 2018 - mdpi.com
Micromanipulation is a hot topic due to its enabling role in various research fields. In order to
perform a high precision operation at a small scale, compliant mechanisms have been …

Spinal treatment devices, methods, and systems

SK Agrawal, P Joon-Hyuk, P Stegall - US Patent 10,639,185, 2020 - Google Patents
Active wearable body brace embodiments provide select-able conformation control of the
interface between the trunk of a human subject and the brace, which conformation may be …

Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner

BJ Kenton, KK Leang - IEEE/ASME Transactions on …, 2011 - ieeexplore.ieee.org
The development of a high-performance three-axis serial-kinematic nanopositioning stage is
presented. The stage is designed for high-bandwidth applications that include video-rate …

Development of a high-bandwidth XY nanopositioning stage for high-rate micro-/nanomanufacturing

S Polit, J Dong - IEEE/ASME Transactions on mechatronics, 2010 - ieeexplore.ieee.org
This paper presents the design analysis fabrication and testing of a high-bandwidth piezo-
driven parallel kinematic nanopositioning XY stage. The monolithic stage design has two …

A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nanomanipulation

Y Li, Q Xu - IEEE Transactions on Automation science and …, 2010 - ieeexplore.ieee.org
This paper reports the design and development processes of a totally decoupled flexure-
based XYZ parallel-kinematics micropositioning stage with piezoelectric actuation. The …

New flexure parallel-kinematic micropositioning system with large workspace

Q Xu - IEEE Transactions on Robotics, 2011 - ieeexplore.ieee.org
Flexure-based micropositioning systems with a large workspace are attractive for a variety of
precision engineering applications. In this paper, a new idea of multistage compound …

A generalized constraint model for two-dimensional beam flexures: nonlinear load-displacement formulation

S Awtar, S Sen - 2010 - asmedigitalcollection.asme.org
To utilize beam flexures in constraint-based flexure mechanism design, it is important to
develop qualitative and quantitative understanding of their constraint characteristics in terms …

Design of a large range XY nanopositioning system

S Awtar, G Parmar - Journal of Mechanisms and …, 2013 - asmedigitalcollection.asme.org
Achieving large motion range (> 1 mm) along with nanometric motion quality (< 10 nm)
simultaneously has been a key challenge in nanopositioning systems. Practical limitations …

Development and active disturbance rejection control of a compliant micro-/nanopositioning piezostage with dual mode

H Tang, Y Li - IEEE Transactions on Industrial Electronics, 2013 - ieeexplore.ieee.org
In the atomic force microscope (AFM) scanning system, the piezoscanner is significant in
realizing high-performance tasks. To cater to this demand, a novel compliant two-degrees-of …