This review gives a brief overview of microvalves, and focuses on the actuation mechanisms
and their applications. One of the stumbling blocks for successful miniaturization and …

This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

We might be at the turning point where research in microfluidics undertaken in academia
and industrial research laboratories, and substantially sponsored by public grants, may …

Wafer bonding with intermediate polymer adhesives is an important fabrication technique for
advanced microelectronic and microelectromechanical systems, such as three-dimensional …

In this work a novel room-temperature bonding technique based on chemically activated
Fluorinated Ethylene Propylene (FEP) sheet as an intermediate between chemically …

A novel technique for bonding polymer substrates using PDMS-interface bonding is
presented in this paper. This novel bonding technique holds promise for achieving precise …

Microfabrication of analytical devices is currently of growing interest and many
microfabricated instruments have also entered the field of mass spectrometry (MS). Various …

This paper presents detailed experimental data on wafer bonding using a thin Parylene
layer, and reports results on: 1) bond strength and its dependence on bonding temperature …

Ultraviolet light-emitting diodes (UV-LEDs) have drawn considerable attention in
environment, life science, and industry fields, such as the applications of near UV-LEDs in …

Biomicroelectromechanical systems (bio-MEMS) are MEMS which are designed for medical
or biological applications. As with other MEMS, bio-MEMS frequently, have to be packaged …