Polymers are ever more widely and more prominently used in microelectromechanical
systems. They provide significant added value to the existing silicon-based technologies …

After decades of improving semiconductor-device reliability, dielectric failure rates resulting
from surface-charge accumulation, dielectric breakdown, and charge injection have been …

This paper presents a new expression for the capacitance model based on ligament
efficiency. The parallel plate capacitance is the first component derived based on the …

A novel technique is used to distinguish the charging of the surface from that of the bulk of
the dielectrics of different types of RF MEMS capacitive switches under different electric …

In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …

Bipolar control-voltage waveforms have been proposed to mitigate dielectric charging in RF
MEMS capacitive switches. In this work, for the first time, dielectric charging under bipolar …

Bipolar control-voltage waveforms, under which the control voltage alternates between
positive and negative after each cycle, have been proposed to mitigate dielectric charging in …

This paper presents an RF microelectromechanical system switched-capacitor suitable for
tunable filters and reconfigurable networks. The switched-capacitor results in a digital …

We develop dynamic actuation methods for capacitive MEMS shunt switches. We show that
the dynamic actuation voltage is significantly less than the static actuation voltage and …

This contribution presents an optimization strategy for the mechanical and geometrical
characteristics of clamped–clamped dielectric-less RF-MEMS switches in order to enhance …