Wide-range humidity sensing and monitoring applications including instrumentation,
agriculture, meteorology, biomedicine, and food processing have attracted long-standing …

This review critically summarizes the recent advances of the microcantilever-based force
sensors for atomic force microscope (AFM) applications. They are one the most common …

Micro-electromechanical systems (MEMS) devices contain various mechanical components
to have mechanical movement of the MEMS structure, such as the microcantilever beam. In …

Gas sensors are devices that can detect and/or discriminate gases in their surroundings.
Some of these devices are based on vibrating structure covered with a coating sensitive to …

Methods to calculate fluid density and viscosity using a micro-cantilever and based on the
resonance principle were put forward. Their measuring mechanisms were analyzed and the …

This article provides a review of methods of predicting mass-induced resonance shifts in
microcantilevers. It combines a review of factors that influence resonance frequency shifts …

Microcantilever platforms with integrated piezoresistors have found versatile applications in
the field of clinical analysis and diagnostics. Even though treatise encompasses numerous …

The development of microelectromechanical system-based sensors, such as microcantilever
sensors, has garnered considerable interest across various fields. Notably, there is a …

Compared to physical microsensors based on the measurement of physical properties of
gases, chemical microsensors are attractive for detection of gas due to their selectivity and …

The fabrication and integration of sub-millimeter magnetic materials into predefined circuits
is of major importance for the realization of portable devices designed for …