[HTML][HTML] CO2 conversion products in α and γ modes of radio frequency capacitively coupled plasma
Z Ye, Q Fu, L Liu, T Wei, J Luo, H Guo… - Journal of Applied …, 2025 - pubs.aip.org
Radio Frequency Capacitively Coupled Plasma (RF-CCP) exhibits excellent spatial
uniformity, high stability, and the capability to generate plasma over large areas, making it …
uniformity, high stability, and the capability to generate plasma over large areas, making it …