The past few decades have witnessed growing research interest in develo** powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …

Focused ion beam (FIB) technology has become increasingly attractive for the fabrication of
micro/nano structures for the purpose of the demands in industry and research. In this paper …

Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer
range. Since the beams can be used to locally alter material at the point where they are …

Manipulation and structural modifications of 2D materials for nanoelectronic and nanofluidic
applications remain obstacles to their industrial‐scale implementation. Here, it is …

This article considers the fundamentals of what happens in a solid when it is impacted by a
medium-energy gallium ion. The study of the ion/sample interaction at the nanometer scale …

Abstract 2D focused ion beam simulation is only capable of simulating the topography
where the surface shape does not change along the third dimension, both in the final result …

Focused ion beam (FIB) milling is receiving increasing attention for nanostructuring in silicon
(Si). These structures can for example be used for photonic crystal structures in a silicon-on …

Focused ion beam (FIB) technology makes use of a highly-focused beam of charged ions to
perform precise nanopatterning tasks by steering it over a sample, tracing patterns defined …

We report a direct, ion drilling technique that enables the reproducible fabrication and
placement of nanopores in membranes of different thickness. Using a 30 keV focused Ga …

The linear inverse problem for energy beam processing, in which a desired etched profile is
known and a trajectory of the beam that will create it must be found, is studied in this paper …