A review of micromachined sensors for automotive applications

P Mohankumar, J Ajayan, R Yasodharan, P Devendran… - Measurement, 2019 - Elsevier
The development of onboard sensors in combination with internet connectivity provides a
better driving experience, which fuels the growth of automotive market. The ever growing …

Micromachined mechanical resonant sensors: From materials, structural designs to applications

T Dinh, M Rais‐Zadeh, T Nguyen… - Advanced Materials …, 2024 - Wiley Online Library
Driving a micro and nanomechanical structure to resonance and observing its resonant
motion in the physical world have led to numerous fundamental discoveries in physics …

Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing

T Manzaneque, V Ruiz-Díez, J Hernando-García… - Sensors and Actuators A …, 2014 - Elsevier
The resonant characteristics of a mechanical resonator immersed in liquid provide valuable
parameters for density and viscosity sensing. In particular, the combination of …

Fluid density sensing using piezoelectric micromachined ultrasound transducers

K Roy, H Gupta, V Shastri, A Dangi… - IEEE Sensors …, 2019 - ieeexplore.ieee.org
We report on the suitability of a Piezoelectric Micromachined Ultrasound Transducer (PMUT)
based system for fluid density measurement in both static and dynamic conditions. We …

Reduced order models for resonant viscosity and mass density sensors

M Heinisch, T Voglhuber-Brunnmaier… - Sensors and Actuators A …, 2014 - Elsevier
A generalized reduced order model for resonant viscosity and mass density sensors is
presented and experimentally verified. The reduced expressions for the resonance …

Flow-through sensor based on piezoelectric MEMS resonator for the in-line monitoring of wine fermentation

J Toledo, V Ruiz-Díez, G Pfusterschmied… - Sensors and Actuators B …, 2018 - Elsevier
The traditional procedure followed by winemakers for monitoring grape must fermentation is
not automated, has not enough accuracy or has only been tested in discrete must samples …

Viscosity and density measurements using mechanical oscillators in oil and gas applications

M Gonzalez, HR Seren, G Ham, E Buzi… - IEEE Transactions …, 2017 - ieeexplore.ieee.org
Real-time monitoring of wellbore fluids is of crucial importance for oil recovery. During
various operations such as drilling, production, stimulation, and intervention, the …

Application of resonant steel tuning forks with circular and rectangular cross sections for precise mass density and viscosity measurements

M Heinisch, T Voglhuber-Brunnmaier… - Sensors and Actuators A …, 2015 - Elsevier
The feasibility of using commercially available steel tuning forks for viscosity and mass
density sensing is investigated. For this task, the tuning forks are electromagnetically driven …

Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection

M Bertke, G Hamdana, W Wu, HS Wasisto… - Journal of …, 2017 - iopscience.iop.org
In this paper, the asymmetric resonance frequency (f 0) responses of thermally in-plane
excited silicon cantilevers for a pocket-sized, cantilever-based airborne nanoparticle …

Vibrational modes in MEMS resonators

D Platz, U Schmid - Journal of Micromechanics and …, 2019 - iopscience.iop.org
Advances in microfabrication technology have enabled micromechanical systems (MEMS)
to become a core component in a manifold of applications. For many of these applications …