Resolution limits of electron-beam lithography toward the atomic scale

VR Manfrinato, L Zhang, D Su, H Duan, RG Hobbs… - Nano …, 2013 - ACS Publications
We investigated electron-beam lithography with an aberration-corrected scanning
transmission electron microscope. We achieved 2 nm isolated feature size and 5 nm half …

[HTML][HTML] Electron beams near surfaces: The concept of partial intensities for surface analysis and perspective on the low energy regime

WSM Werner - Frontiers in Materials, 2023 - frontiersin.org
Electron beam techniques are indispensable tools for the analysis of surfaces in
fundamental as well as applied fields of science and technology. Significant improvements …

Laser-based double photoemission spectroscopy at surfaces

CT Chiang, A Trützschler, M Huth, R Kamrla… - Progress in Surface …, 2020 - Elsevier
The recent development of double photoemission (DPE) spectroscopy at surfaces using
laser-based high-order harmonic generation in combination with time-of-flight electron …

[หนังสือ][B] Radiation synthesis of materials and compounds

BI Kharisov, OV Kharissova, UO Méndez - 2016 - books.google.com
This book presents the state of the art of the synthesis of materials, composites, and
chemical compounds, and describes methods based on the use of ionizing radiation. It is …

[HTML][HTML] Optical and electronic properties of amorphous silicon dioxide by single and double electron spectroscopy

V Astašauskas, A Bellissimo, P Kuksa… - Journal of Electron …, 2020 - Elsevier
An investigation of the optical and electronic properties of amorphous silicon dioxide by
means of a combination of reflection electron energy loss spectroscopy (REELS) and …

Energy Dissipation of Fast Electrons in Polymethylmethacrylate: Toward a Universal Curve for Electron-Beam Attenuation in Solids between and Relativistic …

WSM Werner, F Simperl, F Blödorn, J Brunner, J Kero… - Physical Review Letters, 2024 - APS
Spectroscopy of correlated electron pairs was employed to investigate the energy
dissipation process, as well as the transport and the emission of low-energy electrons on a …

[HTML][HTML] Secondary electron generation mechanisms in carbon allotropes at low impact electron energies

A Bellissimo, GM Pierantozzi, A Ruocco… - Journal of Electron …, 2020 - Elsevier
More than a century after the discovery of the electron, there are still fundamental, yet
unresolved, questions concerning the generation-ejection mechanism of the ubiquitous …

Quantitative material analysis using secondary electron energy spectromicroscopy

W Han, M Zheng, A Banerjee, YZ Luo, L Shen… - Scientific reports, 2020 - nature.com
This paper demonstrates how secondary electron energy spectroscopy (SEES) performed
inside a scanning electron microscope (SEM) can be used to map sample atomic number …

Electron emission yield for low energy electrons: Monte Carlo simulation and experimental comparison for Al, Ag, and Si

J Pierron, C Inguimbert, M Belhaj, T Gineste… - Journal of Applied …, 2017 - pubs.aip.org
The electron emission under electron impact between 10 eV and 2 keV is investigated with a
Monte Carlo (MC) code in aluminum, silver, and silicon. The code is based on the complex …

Surface sensitivity of secondary electrons emitted from amorphous solids: calculation of mean escape depth by a Monte Carlo method

YB Zou, SF Mao, B Da, ZJ Ding - Journal of Applied Physics, 2016 - pubs.aip.org
A Monte Carlo simulation method for study of electron-solid interaction based on modeling
of cascade secondary electron (SE) production and transportation has been used to …