A planar single-actuator bi-stable mechanical/electrical switch

An Approach to Near Zero Power Bi-Stable Driving With a Simple Pulse Signal for RF MEMS Switch‏

R He, L Wang, Z Sun, J Zhao - Journal of …, 2024‏ - ieeexplore.ieee.org‏
This paper reports a novel bi-stable structure for a radio frequency micro-electro-mechanical
system (RF MEMS) switch. The structure is activated by an in-plane electrostatic actuator …‏
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Micro-Fabricated bi-stable Mechanical Switch Actuated by a Single Thermal Actuator‏

J Liu, Y Ohara, Z Xu, R Liu, Z Li, X Wang… - … Conference on Solid …, 2023‏ - ieeexplore.ieee.org‏
A miniaturized, micro-fabricated planar bi-stable mechanical switch is introduced, featuring a
lever-based displacement amplifier and a single electro-thermal actuator. This switch utilizes …‏
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