Characterization of a non-interdigitated comb drive

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[HTML][HTML] Measurement of in-plane motions in MEMS

M Arabi, M Gopanchuk, E Abdel-Rahman, M Yavuz - Sensors, 2020 - mdpi.com
We report a technique to measure in-plane and out-of-plane motions of MEMS using typical
out-of-plane (single-axis) Laser Doppler Vibrometers (LDVs). The efficacy of the technique is …
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[PDF][PDF] Electrostatic Micro-Tweezers

A Alneamy - 2020 - uwspace.uwaterloo.ca
This dissertation presents a novel electrostatic micro-tweezers designed to manipulate
particles with diameters in the range of 5-14 μm. The tweezers consist of two grip-arms …
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