A review of nanometer resolution position sensors: Operation and performance
AJ Fleming - Sensors and Actuators A: Physical, 2013 - Elsevier
Position sensors with nanometer resolution are a key component of many precision imaging
and fabrication machines. Since the sensor characteristics can define the linearity …
and fabrication machines. Since the sensor characteristics can define the linearity …
Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
Design and analysis of a novel flexure-based 3-DOF mechanism
This paper focuses on the design and analysis of a novel flexure-based mechanism which is
capable of performing planar motion with three degrees of freedom (3-DOF). This …
capable of performing planar motion with three degrees of freedom (3-DOF). This …
Nanopositioning system with force feedback for high-performance tracking and vibration control
AJ Fleming - IEEE/Asme Transactions on Mechatronics, 2009 - ieeexplore.ieee.org
In this study, the actuator load force of a nanopositioning stage is utilized as a feedback
variable to achieve both tracking and dam**. The transfer function from the applied …
variable to achieve both tracking and dam**. The transfer function from the applied …
A new method for robust dam** and tracking control of scanning probe microscope positioning stages
This paper demonstrates a simple second-order controller that eliminates scan-induced
oscillation and provides integral tracking action. The controller can be retrofitted to any …
oscillation and provides integral tracking action. The controller can be retrofitted to any …
Design, modeling, and FPAA-based control of a high-speed atomic force microscope nanopositioner
An XYZ nanopositioner is designed for fast the atomic force microscopy. The first resonant
modes of the device are measured at 8.8, 8.9, and 48.4 kHz along the X-, Y-, and Z-axes …
modes of the device are measured at 8.8, 8.9, and 48.4 kHz along the X-, Y-, and Z-axes …
Sensing and self-sensing actuation methods for ionic polymer–metal composite (ipmc): A review
Ionic polymer–metal composites (IPMC) are smart material transducers that bend in
response to low-voltage stimuli and generate voltage in response to bending. IPMCs are …
response to low-voltage stimuli and generate voltage in response to bending. IPMCs are …
Improvement in the imaging performance of atomic force microscopy: A survey
Nanotechnology is the branch of science which deals with the manipulation of matters at an
extremely high resolution down to the atomic level. In recent years, atomic force microscopy …
extremely high resolution down to the atomic level. In recent years, atomic force microscopy …
A novel piezoelectric strain sensor for simultaneous dam** and tracking control of a high-speed nanopositioner
This paper presents a novel piezoelectric strain sensor for dam** and accurate tracking
control of a high-speed nanopositioning stage. Piezoelectric sensors have the benefit of …
control of a high-speed nanopositioning stage. Piezoelectric sensors have the benefit of …
Adaptive control of a fiber scanner with piezoelectric sensing
Improved systems, methods, and devices relating to optical fiber scanners are provided. In
one aspect, a scanning apparatus includes an optical fiber and a piezoelectric actuator …
one aspect, a scanning apparatus includes an optical fiber and a piezoelectric actuator …