Silicon photonic platform for passive waveguide devices: materials, fabrication, and applications
Silicon photonics has attracted tremendous interest from academia and industry, as the
fabrication of the silicon family of photonic devices is mostly compatible with the …
fabrication of the silicon family of photonic devices is mostly compatible with the …
Large-scale quantum photonic circuits in silicon
Quantum information science offers inherently more powerful methods for communication,
computation, and precision measurement that take advantage of quantum superposition and …
computation, and precision measurement that take advantage of quantum superposition and …
Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications
Silicon nitride photonics is on the rise owing to the broadband nature of the material,
allowing applications of biophotonics, tele/datacom, optical signal processing and sensing …
allowing applications of biophotonics, tele/datacom, optical signal processing and sensing …
Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuits
The high index contrast silicon-on-insulator platform is the dominant CMOS compatible
platform for photonic integration. The successful use of silicon photonic chips in optical …
platform for photonic integration. The successful use of silicon photonic chips in optical …
CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects
Silicon photonics enables the fabrication of on-chip, ultrahigh-bandwidth optical networks
that are critical for the future of microelectronics,,. Several optical components necessary for …
that are critical for the future of microelectronics,,. Several optical components necessary for …
Waveguide-integrated high-performance magneto-optical isolators and circulators on silicon nitride platforms
Optical isolators and circulators are important components for photonic integrated circuits.
Despite significant progress on silicon-on-insulator (SOI) platforms, integrated optical …
Despite significant progress on silicon-on-insulator (SOI) platforms, integrated optical …
Photonic damascene process for low-loss, high-confinement silicon nitride waveguides
MHP Pfeiffer, C Herkommer, J Liu… - IEEE Journal of …, 2018 - ieeexplore.ieee.org
We report on fabrication of high-confinement and low loss silicon nitride (Si 3 N 4)
waveguides using the photonic Damascene process. This process scheme represents a …
waveguides using the photonic Damascene process. This process scheme represents a …
Foundry developments toward silicon nitride photonics from visible to the mid-infrared
Photonic integration technologies have spread in the past decade by means of foundry
models that mirror the electronic-integrated circuit industry developments of the past century …
models that mirror the electronic-integrated circuit industry developments of the past century …
Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications
SiN x layers intended for photonic applications are typically fabricated using LPCVD and
PECVD. These techniques rely on high-temperature processing (> 400 C) to obtain low …
PECVD. These techniques rely on high-temperature processing (> 400 C) to obtain low …
Scalable 3D dense integration of photonics on bulk silicon
We experimentally show vertically stacked, multi-layer, low-temperature deposited photonics
for integration on processed microelectronics. Waveguides, microrings, and crossings are …
for integration on processed microelectronics. Waveguides, microrings, and crossings are …