An accurate understanding of infrastructure performance is beneficial for averting potentially
severe accidents during construction because the increasing development of urban …

3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical
properties (high Young's modulus and low density) that allow the device to be operated for a …

The paper reports on the fabrication and characterization of high-resolution strain sensors
for structural materials based on Silicon On Insulator flexural resonators manufactured by …

This paper describes a technical approach toward the realization of a low-power
temperature-compensated micromachined resonant strain sensor. The sensor design is …

The paper reports on the fabrication and characterization of flexural resonators designed for
resonant strain sensing and manufactured using 2 μm thick monocrystalline 3C-SiC layers …

Sensors and sensorized components are gaining for importance in hydraulics, due to
increasing need for control and diagnostics. Sensors and specifically pressure sensors are …

This paper reports the demonstration of an ultra-low-power micro-electromechanical system
(MEMS)-CMOS oscillator for strain sensing, powered by a miniature piezoelectric vibration …

Future-proofing our existing and new infrastructure has become a constant theme in
government and industry discussions. To achieve this, we need to understand the …

A micromechanical structure for on-chip strain sensing maps strain-induced gap changes to
resonance frequency shifts while employing differential strategies to null out bias …

One of the greatest challenges facing civil engineers is the stewardship of ageing
infrastructure. At present, it is difficult to inspect the condition of infrastructure while it is being …