Abstract Advanced Process Control (APC) has become an increasingly pressing issue for
the semiconductor industry, particularly in the new era of sub-5nm process technology. To …

The ultimate objective of “Zero-Defect Manufacturing,” as a new growth step of Industry 4.0,
is to significantly increase product yield and eventually accomplish zero-defect. For product …

With much attention being placed on reducing manufacturing costs and improving
productivity, maintaining process tools in good operating conditions is one of the most …

In the manufacturing process, sensor data collected from equipment is crucial for building
predictive models to manage processes and improve productivity. However, in the field, it is …

Quality monitoring is an essential element of defect detection in semiconductor
manufacturing processes, but semiconductor companies use virtual metrology (VM) in …

Fault Detection and Classification (FDC) Data reflects machine real-time status that provide
information for diagnosing processing quality. In practice, most semiconductor engineers …

Etching is an important process in semiconductor technology. Inconsistency in post Etching
wafer uniformity and geometry affects downstream process margin which leads to various …

Manufacturing processes are often subject to drifts over production cycles. This study
applies the paradigm of Transfer Learning (TL) to support the updating of a Virtual Metrology …