Advances in micro-and nanofabrication technologies have enabled the development of
novel micro-and nanomechanical resonators which have attracted significant attention due …

for a rectangular cantilever requires measurement of the resonant frequency and quality
factor in fluid (typically air), and knowledge of its plan view dimensions. This intrinsically …

At the microscale, cantilever vibrations depend not only on the microstructure's properties
and geometry but also on the properties of the surrounding medium. In fact, when a …

It is rather significant to reveal the real-time variation of oil sample viscosity during ultrasonic
irradiation to research the mechanism of viscosity change. In this paper, we first simulate the …

In this work the electrical performance of micromachined piezoelectric cantilevers having
different designs is investigated in liquid environment, thus making most beneficially use of …

A micromachined resonator immersed in liquid provides valuable resonance parameters for
determining the fluidic parameters. However, the liquid operating environment poses a …

In this paper, we present a semi-numerical method for determining the dynamics of micro-
resonators with finite width immersed in incompressible viscous fluids. The micro-resonator …

We present a novel resonant MEMS sensor for the detection of particles with dielectric
properties in liquid environments. The sensor consists of a piezoelectrically excited silicon …

We propose a new concept of photoacoustic gas sensing based on capacitive transduction
which allows full integration while conserving the required characteristics of the sensor. For …

This Letter reports on the characterization of the first extensional mode of AlN-actuated mid-
point supported resonant microplates in liquid media. Devices of different dimensions were …