Soft lithography

Y **a, GM Whitesides - Angewandte Chemie International …, 1998 - Wiley Online Library
Elastomeric stamps and molds provide a great opportunity to eliminate some of the
disadvantages of photolithograpy, which is currently the leading technology for fabricating …

New approaches to nanofabrication: molding, printing, and other techniques

BD Gates, Q Xu, M Stewart, D Ryan, CG Willson… - Chemical …, 2005 - ACS Publications
“Nanofabrication” is the process of making functional structures with arbitrary patterns
having minimum dimensions currently defined (more-or-less arbitrarily) to be e100 nm …

Soft lithography for micro-and nanoscale patterning

D Qin, Y **a, GM Whitesides - Nature protocols, 2010 - nature.com
This protocol provides an introduction to soft lithography—a collection of techniques based
on printing, molding and embossing with an elastomeric stamp. Soft lithography provides …

[КНИГА][B] Nanostructures and nanomaterials: synthesis, properties and applications

G Cao - 2004 - books.google.com
This important book focuses on the synthesis and fabrication of nanostructures and
nanomaterials, but also includes properties and applications of nanostructures and …

[КНИГА][B] Fundamentals of microfabrication: the science of miniaturization

MJ Madou - 2018 - books.google.com
MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

[КНИГА][B] Manufacturing techniques for microfabrication and nanotechnology

MJ Madou - 2011 - taylorfrancis.com
Designed for science and engineering students, this text focuses on emerging trends in
processes for fabricating MEMS and NEMS devices. The book reviews different forms of …

[КНИГА][B] Introduction to microfabrication

S Franssila - 2010 - books.google.com
This accessible text is now fully revised and updated, providing an overview of fabrication
technologies and materials needed to realize modern microdevices. It demonstrates how …

[PDF][PDF] Unconventional methods for fabricating and patterning nanostructures

Y **a, JA Rogers, KE Paul… - Chemical …, 1999 - gmwgroup.harvard.edu
Fascinating (and sometimes technologically important) phenomena occur in systems that
have a spatial dimension comparable to that of a fundamental physical, chemical, or …

Lithographic processes for the scalable fabrication of micro-and nanostructures for biochips and biosensors

S Fruncillo, X Su, H Liu, LS Wong - ACS sensors, 2021 - ACS Publications
Since the early 2000s, extensive research has been performed to address numerous
challenges in biochip and biosensor fabrication in order to use them for various biomedical …

Siloxane polymers for high-resolution, high-accuracy soft lithography

H Schmid, B Michel - Macromolecules, 2000 - ACS Publications
We report the formulation of siloxane polymers for high-resolution, high-accuracy stamps for
soft lithography. With this technique, a molecular, polymeric, or liquid ink is applied to the …